大量程六维力传感器设计与标定研究  

Design of big-scale six-axis force sensor and study on calibration test

作　　者：韩康[1] 王智[1] 李昂[1] 夏明一[1] 霍琦[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033

出　　处：《传感器与微系统》2016年第5期87-90,共4页Transducer and Microsystem Technologies

摘　　要：为提高大量程六维力传感器的灵敏度,设计了一种适用于机械臂末端的应变式传感器。该传感器采用十字梁式弹性体结构,通过优化应变梁结构和合理布置应变片等方式,使传感器在大量程条件下仍具有较高的刚度和灵敏度。使用有限元法分析验证了传感器应力分布的合理性,并根据最小二乘法标定原理对传感器进行解耦标定实验,实验结果表明:传感器静态性能良好,最小灵敏度为0.375 m V/N,满足使用要求。To increase sensitivity of big scale six-axis force sensor,a strain sensor which can be used in mechanic arm end is designed. Crossbeam elastic body structure is used,and sensor has high stiffness and sensitivity under big scale by optimizing strain beam structure and reasonable arranging of strain gauge. The finite element method is used to testify the reasonable of stress distribution. A decoupling and calibration test is taken based on the least square calibration principle,and experimental results show that the sensor has good static performance,and the minimum sensitivity is 0. 375 m V / N,which can meet application requirement.

关 键 词：六维力传感器 十字梁式弹性体 灵敏度 有限元法 解耦标定 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]