微球球度测量技术的研究进展  

Advances in Sphericity Measurement Technology of Micro Sphere

作　　者：黄强先[1] 胡小娟[1] 卞亚魁 梅腱[1] 张连生[1] 陈丽娟[1] 

机构地区：[1]合肥工业大学,合肥230009

出　　处：《中国机械工程》2016年第9期1271-1277,共7页China Mechanical Engineering

基　　金：国家自然科学基金资助项目(51475131)

摘　　要：根据目前微球球度测量技术的原理,首先将其分为接触式测量和非接触式测量,其中非接触测量主要分为光学图像测量法和激光干涉测量法,就此对国内外微球球度测量技术进行了介绍和比较,并指出各种测量技术需要解决的问题。然后针对这些技术的局限性,如被测尺寸较大、测量精度不高、测量对象材料限制等,探讨了目前正在研究中的新型球度测量方法和技术。最后对微球球度测量方法和技术的研究及开发趋势进行了总结和展望。Firstly,the present sphericity measurement techniques of micro sphere were divided into contact and non-cantact measurement technology according to their principles,and the latter was mainly based on optical image or laser interferometry. Then,the domestic and foreign research progress of sphericity measurement techniques of micro sphere were reviewed and compared,and the main problems of them needed to be solved were listed. In order to overcome the shortages of these techniques,such as low accuracy,lager object size,limit of object material,et al,new developing sphericity measurement techniques of micro sphere were discussed. Finally,the summary and prospect of sphericity measurement technology of micro sphere were given.

关 键 词：微球 球度 三维测量 微纳测量 

分 类 号：TH71[机械工程—测试计量技术及仪器] TH89[机械工程—仪器科学与技术]