以硅片线锯屑和石英为原料合成氮氧化硅粉体研究  

Synthesis of Silicon Oxynitride from Silicon Sawdust and Quartz

作　　者：李兵[1] 尹传强[1] 魏秀琴[1] 周浪[1] 

机构地区：[1]南昌大学光伏研究院/材料科学与工程学院,南昌330031

出　　处：《人工晶体学报》2016年第4期892-895,900,共5页Journal of Synthetic Crystals

基　　金：江西省优势科技创新团队计划专项(20113BCB24007);有色金属及特色材料加工重点实验室开放基金(12KF-20)

摘　　要：研究了以回收提纯的太阳电池硅片线锯屑粉与粗粒石英粉为原料直接用N2气体氮化合成氮氧化硅(Si_2N_2O)的工艺条件,分析原料配比和反应温度对氮氧化合成产物的影响。结果表明,采用这种线锯硅屑粉为原料,可以在1450℃下4 h常压纯氮合成条件下得到氮氧化硅产物;当原料摩尔比n(Si)/n(SiO_2)=1.5时,所得产物在XRD检测能力范围显示为纯Si_2N_2O相,不含氮化硅副产物相。从反应相对增重量分析推测,反应体系中可能包含SiO_2在高温和低氧分压条件下的转变为Si_2N_2O的过程。Experiments of silicon oxynitride synthesis from recycled and purified silicon sawdust generated in silicon wafering by diamond wire sawing were carried out. The effects of molar ratio of reactants and temperature on phase constitution of the products were investigated. The results show that,silicon oxynitride powders can be obtained at 1450 ℃ /4 h under ambient pressure of pure nitrogen. When the molar ratio of reactants n（ Si） / n（ SiO2） = 1. 5,pure Si2N2O phase without inclusion of silicon nitride,as examined by XRD,can be obtained. Based on analysis of the relative weight gain in the reaction,it is postulated that the reaction process may include transfer of SiO2 to Si2N2O under condition of high temperature and low oxygen pressure.

关 键 词：氮氧化硅 硅锯屑 石英 

分 类 号：TQ174[化学工程—陶瓷工业]