基于四极质谱仪O形氟橡胶圈的放气研究  

THE DEFLATED RESEARCH ON VITON O-RING BASED ON USING QUADRUPOLE MASS SPECTROMETER

作　　者：代彦伟 肖梅[1] 张晓兵[1] 吴晓斌[2] 王魁波[2] 罗艳[2] 

机构地区：[1]东南大学电子科学与工程学院,南京210096 [2]中国科学院光电研究院,北京100000

出　　处：《真空与低温》2016年第3期170-172,共3页Vacuum and Cryogenics

摘　　要：在真空系统中,接口之间的密封主要有金属与橡胶密封。橡胶属于弹性元件,是一种适应性很强的密封件,其广泛应用于真空系统中。实验研究了O形氟橡胶圈放气特性对痕量气体分析的影响,在利用超高真空封闭式离子源的四极质谱系统,对O形氟橡胶圈释放气体进行分析。实验发现O形氟橡胶圈释放大量的氧气等杂质气体,在痕量杂质分析系统上,不适合使用O形橡胶圈作为密封器件。In the vacuum system,there are two important ways to seal the interface which are metal seal and rubber seal. The rubber seal belongs to self-tight seal,which is a kind of adaptable seals. So the rubber seal is used widely under the high vacuum. This paper discusses the deflated characteristics of Viton O-ring impact on analysis of trace impurity gas-es by using quadrupole mass spectrometer with closed ion source system. It is found that the Viton O-ring releases large amounts of oxygen. It' s not suitable for using the rubber O-ring as seal device in the trace of impurity analysis system.

关 键 词：O形橡胶圈 痕量杂质气体 封闭式离子源 四极质谱仪 

分 类 号：TB773[一般工业技术—真空技术] TH145[一般工业技术—材料科学与工程]