兰姆波型谐振器的制备与测试  

Preparation and Testing of Lamb Wave Resonator

作　　者：邓言文[1] 彭斌[1] 张万里[1] 陈鹏[1] 王睿[1] 姜建英[1] 

机构地区：[1]电子科技大学电子薄膜与集成器件国家重点实验室,四川成都610054

出　　处：《压电与声光》2016年第3期401-404,共4页Piezoelectrics & Acoustooptics

基　　金：自然科学基金资助项目(61223002)

摘　　要：采用磁控溅射、光刻、腐蚀、电子束蒸发等工艺,在AlN薄膜表面设计和制备了兰姆波(Lamb)型谐振器。研究了Lamb谐振器频率特性与频率-温度特性,并与传统的瑞利波(Rayleigh)型谐振器进行对比。测试结果表明,Rayleigh谐振器的谐振频率为305.15 MHz,温度灵敏度为10.74kHz/℃;而Lamb谐振器有7个谐振频率,分别为294.630MHz,398.125MHz,435.625MHz,482MHz,531.625MHz,570MHz和613.625MHz,其温度灵敏度分别为10.63kHz/℃,13.46kHz/℃,16.09kHz/℃,17.51kHz/℃,18.95kHz/℃,20.76kHz/℃和21.86kHz/℃。结果表明,兰姆波型谐振器高阶模式的温度灵敏度最高,达到21.86kHz/℃。The lamb wave resonator was designed and prepared on the surface of AlN films through the magnetron sputtering,photolithography,etching,electron beam evaporation and other processes.The frequency and frequency-temperature characteristics of Lamb wave resonator were studied,and the comparison with the cinventional Rayleigh wave resonator was carrie out.The test results show that the resonant frequency and temperature sensitivity of Rayleigh wave resonator are 305.15 MHz,10.74kHz/℃ respectively,while Lamb wave resonator has seven resonant frequencies which are 294.630 MHz,398.125 MHz,435.625 MHz,482MHz,531.625 MHz,570MHz and 613.625 MHz respectively,the corresponding temperature sensitivity are 10.63kHz/℃,13.46kHz/℃,16.09kHz/℃,17.51kHz/℃,18.95kHz/℃,20.76kHz/℃,21.86kHz/℃respectively.All the results indicated that the temperature sensitivity of Lamb wave resonator reaches the maximum of 21.86kHz/℃.

关 键 词：兰姆波型谐振器 谐振频率 温度特性 ALN薄膜 

分 类 号：TN65[电子电信—电路与系统]