基于微型控制器的原子光刻系统自动化控制研究  

Research on microcontroller-based automatic control of atom lithography system

作　　者：刘逸轩[1] 

机构地区：[1]海口经济学院公共课部,海南海口571127

出　　处：《现代电子技术》2016年第13期124-127,共4页Modern Electronics Technique

摘　　要：原子光刻系统的设备庞大而复杂,在实验过程中温度及稳频光等参数都需要监视和控制。针对目前多采用人员值守的方式对设备进行操控导致实验效率低下的现状,介绍了原子沉积原理和原子沉积实验装置的构造及主要功能,提出了原子沉积实验装置中温度控制方案和稳频光的差分信号数据采集方案。通过完成对温度信号和稳频光信号等实验数据的自动采集与记录,实现了原子光刻系统的温控系统自动化和激光稳频系统的远程控制。该方案不仅提高了实验效率,而且对USB开发人员和自动化研究人员也具备一定的参考价值。The atom lithography system is a big and complex device,and the parameters of temperature and frequency sta?bilization light need to monitor and control in experimentation. Since the experiment efficiency is low due to the device is con?trolled by means of the method with people on duty,the principle of atomic layer deposition,structure and main function of atomic layer deposition experiment device are introduced. The data acquisituon scheme of frequency stabilization light differen?tial signal and temperature control scheme in atomic layer deposition experiment device is proposed. The experimental data of temperature signal and frequency stabilization light signal is automaticlly collect and record to realize the automatic temperature control system for atomic lithography system and remote control of laser frequency stabilization system. The scheme can improve the experiment efficiency,and has a certain reference value for USB developers and automation researchers.

关 键 词：原子光刻 温度控制 数据采集 USB接口 

分 类 号：TN305.7[电子电信—物理电子学] TM417[电气工程—电器]