空心阴极辅助多弧镀(Ti,Al)N涂层物相组成及性能  

Phase Composition and Properties of (Ti,Al)N Coatings Deposited by Multi-arc Ion Plating Assisted with Hollow Cathode

作　　者：吴化[1] 尤申申 姜颖[1] 

机构地区：[1]长春工业大学先进结构材料省部共建教育部重点实验室,吉林长春130012

出　　处：《稀有金属材料与工程》2016年第5期1209-1214,共6页Rare Metal Materials and Engineering

基　　金：长春市科技支撑计划(11K246)

摘　　要：采用空心阴极离子束辅助多弧离子镀技术,通过变换靶材中Ti-Al比例(Al含量分别为30 at%、50 at%和70 at%)沉积了(Ti,Al)N涂层。利用XRD、激光共聚焦显微镜、材料表面微纳米力学测试系统等检测了涂层的质量和性能。研究了涂层的相组成、表面粗糙度、摩擦系数和硬度、以及涂层的耐高温性能等随靶材成分比例改变而变化的规律。结果表明,当靶材中Al含量为50 at%时,沉积层相组成以Ti_(1-x)Al_xN为主,涂层粗糙度和摩擦系数最小,分别为0.3188和0.6074,而硬度值最高,为34.19 GPa;加热温度低于800℃时涂层物相组成没有发生明显变化,900℃时涂层产生开裂基体被氧化;空心阴极离子束辅助沉积时能够形成"混合界面",并减轻涂层表面"大颗粒"现象。（Ti, Al）N coatings were prepared under different Ti/Al mosaic targets（30 at%Al, 50 at%Al, 70 at%Al） by multi-arc ion plating technology which was in hollow cathode electron beam assisted deposition situation. The quality and properties of the coatings were detected by XRD, CLSM and universal nano/micro material tester. The effects of Ti/Al target on phase composition, surface roughness, friction coefficient, hardness and oxidation resistance were analyzed. The results show that the coating produced by 50 at%Al target is mainly composed of Ti（1-x）AlxN phase, which shows minimum surface roughness（0.3188）, minimum friction coefficient（0.6074）, and maximum hardness（34.19 GPa）. The coating exhibits no obvious change on phase composition when heating temperature is below 800℃. However, at 900 ℃ the substrate is oxidized due to the coating cracks. ＂Hybrid interface＂ can form when hollow cathode electron beam assists deposition, and ＂surface roughness＂ can also be reduced under this condition.

关 键 词：离子束辅助沉积 (TI AL)N涂层 相组成 

分 类 号：TG174.444[金属学及工艺—金属表面处理]