白色光阻材料在OGS工艺中的应用  

Application of white matrix material on one glass solution process for touch panel

作　　者：冯京[1] 徐传祥[1] 张方振[1] 惠官宝[1] 张锋[1] 姚琪[1] 

机构地区：[1]京东方科技集团股份有限公司技术研发中心,北京100176

出　　处：《液晶与显示》2016年第6期525-531,共7页Chinese Journal of Liquid Crystals and Displays

基　　金：京东方科技集团股份有限公司研发火种基金项目(No.FR25)~~

摘　　要：分析了白色光阻材料在不同温度、不同厚度和不同化学品浸泡下色度值、分辨率和附着力的变化情况。验证了白色光阻材料在OGS(One glass solution)触摸屏生产中的工艺条件。首先,关注白色光阻材料的光密度值(OD值)、分辨率、耐化性、耐高温性能以及在不同厚度下白色光阻材料的色度变化。然后对白色光阻材料和触摸屏制作工艺进行工艺整合,提出了采用白色光阻加黑矩阵的双层结构,可以保证白色光阻材料的OD值,防止后面的金属线被透视出来,其中白色光阻的厚度控制在15μm,黑矩阵的厚度在1.2μm。在后续的Photo工艺时,调整工艺参数,加大了PR的厚度并加大曝光显影时间,成功解决了这种高段差造成的金属线Open和Remain问题,并采用OGS工艺制作了白色光阻触摸屏样品。The chromaticity,resolution and adhesion strength of the white matrix materials for touch panel were analyzed at different conditions of temperatures,thickness and chemical solutions.Thus the white matrix materials were verified for one glass solution（OGS）process for touch panel.First,we focused our studies on the optical density（OD）value,resolution,chemical resistance and thermos-stability of the material with different thicknesses.The changes of chromaticity values at different thicknesses were studied.Then,we applied the white matrix material to the OGS touch panel process.In order to ensure the OD value being greater than 4.0 and make metal line on touch panel invisible,we proposed a dual layer structure including white matrix layer and black matrix（BM）layer.The white matrix layer thickness was 15μm and the BM layer thickness was 1.2μm.In the practical photo process,we adjusted the process parameters,such as increasing the photo-resistance thickness,exposure intensity and developing time,and successfully solved the metal open and metal remain problems.In the end,the touch panel with white matrix and BM by OGS technology was demonstrated.

关 键 词：白色光阻 色度 耐化性 光密度 

分 类 号：O472.1[理学—半导体物理]