基于声传感器的新型MEMS听诊探头结构设计初探  

Design of Novel MEMS Stethoscope Probe Based on Acoustic Sensors

作　　者：郭楠[1,2] 张国军[1,2] 王续博 刘源[1,2] 刘梦然[1,2] 张斌珍[1,2] 薛晨阳[1,2] 张文栋[1,2] 

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,太原030051 [2]中北大学电子测试技术重点实验室,太原030051

出　　处：《电子器件》2016年第3期535-539,共5页Chinese Journal of Electron Devices

基　　金：国家863计划项目(2013AA09A414)

摘　　要：针对传统听诊器主要依靠医生听诊,根据个人经验判断病情的问题,结合MEMS技术和声传感器,设计了一种基于声传感器的新型MEMS听诊探头微结构。该MEMS听诊系统由MEMS听诊探头中的敏感微结构接收人体心音信号,经过运算放大和滤波,转换为电信号进行后续分析。建立了听诊头敏感微结构的数学模型,利用ANSYS软件仿真得到该结构的动态特性。利用MEMS工艺加工出听诊头敏感微结构并进行初步测试,测试结果表明提出的基于声传感器的新型MEMS听诊器可以实时显示听诊对象的心音波形。将MEMS声传感器应用于临床听诊为心音采集提出了一种新的思路,具有广泛应用前景。Traditional auscultation of heart sounds mainly relies on doctor’s personal experiences,which is quite in-accurate sometimes. With the combination of MEMS technology and acoustic sensors,a kind of novel based on acoustic sensors was proposed and designed. The sensitive microstructure of MEMS stethoscope probe receives the heart sounds signal and transforms them into electrical signals after amplifying and filtering. The mathematical mod-el was established. The dynamic characteristics of the structure were obtained by use of ANSYS. Preliminary test was conducted for the MEMS stethoscope probe which was fabricated by means of MEMS processing technology. It can clearly display the waveforms of heart signals in real time,which shows that applying MEMS acoustic sensors in-to medical clinical auscultation of heart sounds provides a new idea and has wide application prospect.

关 键 词：MEMS技术 声传感器 听诊探头 敏感微结构 

分 类 号：TP212.3[自动化与计算机技术—检测技术与自动化装置]