基于微加热器平台的高性能甲烷传感器  

High Performance Methane Gas Sensor Based on Micro-hotplatform

作　　者：郭联峰[1,2] 许宗珂 段国韬[3] 李铁[1,2] 

机构地区：[1]中国科学院上海微系统与信息技术研究所,上海200050 [2]微系统技术国家实验室,上海200050 [3]中国科学院固体物理研究所,安徽合肥230031

出　　处：《郑州大学学报（工学版）》2016年第3期40-43,共4页Journal of Zhengzhou University（Engineering Science）

基　　金：国家科技支撑计划课题(2012BAJ11B01);国家自然科学基金创新群体项目(61321492);国家自然科学基金重大研究计划集成项目(91323304)

摘　　要：设计制造了基于微型加热器平台(MHP)的甲烷气体传感器.微加热器平台因其功耗低、体积小等特点可广泛应用于半导体气体传感器中.微加热器平台的制作是基于IC兼容的MEMS工艺完成的,利用模板法在MHP上原位制备二氧化锡(SnO_2)有序多孔薄膜得到微纳融合气体传感器.利用这种方法制造的传感器功耗仅39 m W,响应时间2 s,对714 mg/m^3甲烷的响应可达到1.19,对甲烷的探测下限可达18 mg/m^3.此高性能、低成本的传感器有望在生产生活、安全监控等方面得到广泛应用.High performance methane gas sensor based on micro-hotplafform （MHP） was designed and fabri- cated. MHP is widely used in semiconductor gas sensor because of its low power consumption, small volume characteristics. The MHP is fabricated based on IC compatible MEMS technology. Miero-nano gas senor was prepared through in-situ fabrication of tin dioxide using template method. The power consumption of the sensor is only 39 mW, and the response time is 2 s, and the sensitivity to 714 mg/m3 methane is as high as 1.19. Because of high signal noise ratio, the detection limit is estimated to be 18 mg/m3 through liner fit. The high performance and low cost sensor is expected to be widely used in industry and safety monitoring.

关 键 词：甲烷传感器 微加热器平台 原位制备二氧化锡 模板法 微纳融合 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]