Ag作催化剂制备的SiC纳米材料的形貌及其发光性能  

Morphology and performance of SiC nanorods prepared with catalyst Ag

作　　者：齐晓霞[1,2,3] 许并社[1] 翟光美[1] 梁建[1] 马淑芳[1] 

机构地区：[1]太原理工大学新材料界面科学与工程教育部重点实验室,山西太原030024 [2]中北大学理学院,山西太原030051 [3]太原理工大学材料科学与工程学院,山西太原030024

出　　处：《材料热处理学报》2016年第7期1-5,共5页Transactions of Materials and Heat Treatment

基　　金：国家自然科学基金(61475110;21471111;61404089;61504090);山西省科技创新重点团队(2012041011);山西省基础研究项目(2014011016-6;2014021019-1;2015021103);电子薄膜与集成器件国家重点实验室开放课题(KFJJ201406)

摘　　要：用化学气相沉积法（CVD）通过碳热还原反应在Si（100）衬底上以Ag纳米颗粒为催化剂制备了糖葫芦状的SiC纳米棒。硅源为溶胶凝胶制备的SiO_2,碳源为炭粉。采用X射线分析衍射仪（XRD）、扫描电镜（SEM）、透射电镜（TEM）、高分辨率透射电镜（HRTEM）、荧光光谱（PL）对产物的组成、形貌、微观结构等进行了表征。结果表明,SiC纳米棒都其有周期性的凹凸,形状貌似糖葫芦状,长度范围为300~600 nm,而直径为30~50 nm。纳米结构生长机制为VLS生长模式,其中Ag催化剂对其形貌起到至关重要的影响。室温下SiC纳米棒的PL发光峰与块体SiC的发光特征峰相比有蓝移。Silicon carbide nanorods with the shape of string of candied haws were synthesized on Ag-catalysted silicon substrate by a carbothermal and chemical-vapor-deposition method （CVD） under argon atmosphere using SiO2 xerogel and carbon powder as raw materials. The component, morphology, structure and performance of the SiC nanorods were studied by means of XRD, SEM, TEM, HRTEM, FT-IR, and PL, respectively. The results show that the synthesized products are SiC nanorods with the shape of string of candied haws. The length of the SiC nanorods is within the range of 300 to 600 nm with the diameter of 30 to 50 nm. The formation mechanism of the SiC nanorods with the shape of string of candied was also discussed. Such nanostructure is synthesised by the vapour- liquid-solid growth mechanism and Ag catalyst on silicon substrate exerted crucial influence on the morphology of the SiC nanorods. A unique optical property has also been found in their photoluminescence spectrum, the PL peak exhibits a blue shift compared with the bulk SiC at room temperature.

关 键 词：SiC纳米棒 溶胶凝胶法 显微结构 Ag催化机理 

分 类 号：TB383[一般工业技术—材料科学与工程]