MEMS负电晕放电气体传感器  

A MEMS Gas Sensor Based on Negative Corona Discharge

作　　者：张金英[1,2] 杨天辰 何秀丽[1] 高晓光[1] 贾建[1] 李建平[1] 

机构地区：[1]中国科学院电子学研究所传感技术国家重点实验室,北京100190 [2]中国科学院大学,北京100190

出　　处：《微纳电子技术》2016年第8期508-514,共7页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(61471341)

摘　　要：设计并制备了一种基于负电晕放电原理及微机电系统(MEMS)技术的多针-板型气体传感器。研究了电极间距对传感器放电特性的影响,综合考虑起晕电压、信号输出范围及稳定放电范围,优化电极间距为120μm。测试了传感器在体积分数均为6×10^(-4)的乙酸、异丙醇、乙醇和丙酮四种有机气体中的放电特性,传感器对乙酸气体响应最灵敏。测试了传感器在-0.91 kV放电电压下对乙酸气体的敏感特性。结果表明,该传感器对不同体积分数的乙酸气体的响应具有较好的线性关系,对体积分数为10^(-6)的乙酸气体的响应约为0.61 mV,理论检测限(三倍噪声)约为1.2×10^(-5)。传感器对乙酸气体响应灵敏度高、重复性好。The multi-pin plate gas sensor based on the negative corona discharge principle and micro-electromechanical system（MEMS）technology was designed and fabricated.The effect of the electrode spacing on the discharging characteristics of the sensor was investigated,and considering the onset voltage,signal output range and stable discharge range,the optimized electrode spacing was set as 120μm.The discharging characteristics in four organic gases,i.e.acetic acid,isopropanol,alcohol and acetone with the same volume fraction of 6×10^（-4）,were tested,and the sensor was the most sensitive to the acetic gas.The sensing property to the acetic gas was investigated with the discharge voltage of-0.91 kV.And the results show that the sensor has a good linear relationship between the response and the volume fraction of the acetic gas.The response of the sensor to the acetic gas with the volume fraction of 10^（-6） is about 0.61 mV,and the theoretical detection limit of the acetic gas based on3 times the baseline noise is about 1.2×10^（-5）.The sensor shows high response sensitivity and good repeatability to the acetic gas.

关 键 词：微电子机械系统(MEMS) 气体传感器 硅尖阵列 负电晕放电 多针-板结构 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TH703[自动化与计算机技术—控制科学与工程]