表面处理对Au-CdZnTe电极接触性能的影响  

The Effect of Surface Treatments on the Contact Performance of Au-CdZnTe

作　　者：张大众[1] 朱丽慧[1] 孙士文[2] 周昌鹤[2] 虞慧娴[2] 徐超[2] 

机构地区：[1]上海大学材料学院,上海200072 [2]中国科学院红外成像材料与器件重点实验室,上海200083

出　　处：《红外技术》2016年第7期571-576,共6页Infrared Technology

基　　金：红外成像材料与器件重点实验室开放基金资助项目(IIMDKFJJ-12-01)

摘　　要：碲锌镉(CdZnTe)是制备X射线、γ射线探测器的一种理想半导体材料。CdZnTe欧姆接触电极是制备CdZnTe核辐射探测器的关键技术之一。表面加工状态是影响欧姆接触性能的重要因素,文中研究了4种表面处理工艺对Au-CdZnTe电极接触性能的影响。研究发现对晶片表面进行溴甲醇腐蚀处理和机械化学抛光均有助于提升Au-CdZnTe电极欧姆接触性能。对晶片进行机械化学抛光后再进行溴甲醇腐蚀处理,使用这种晶片所制备的电极具有更加优良的综合电学性能。CdZnTe is a promising material to make the detector of X rays or ）, rays. The preparation of ohmic contact of CdZnTe plays an important role in the device performance. As the surface quality is very important to the ohmic contact characteristic, the effect of four different surface treatments on the electrode contact performance of CdZnTe was studied in this paper. The results show that both etching treatment and chemical-mechanical polishing can improve the ohmic contact characteristic. The electrode which is made of the wafer polished chemically-mechanically and then etched by Br2-MeOHaqueous exhibits excellent electric performance.

关 键 词：碲锌镉 表面处理 机械化学抛光 欧姆接触 

分 类 号：TG175[金属学及工艺—金属表面处理]