微小尺度下平板间气体流动机理及压力特性分析  

Analysis of Gas Flow Mechanism and Pressure Characteristics between Plates in Micro Scale

作　　者：宁方伟[1] 龙威[1] 刘岩[1] 

机构地区：[1]昆明理工大学,昆明650500

出　　处：《中国机械工程》2016年第14期1862-1865,共4页China Mechanical Engineering

基　　金：国家自然科学基金资助项目(51305185)

摘　　要：基于平板间气膜内气体分子运动和碰撞的规律,提出气膜分层理论,将板间气膜内的气体划分为近壁层、稀薄层、连续流层。给出了划分稀薄层和连续流层的依据,建立分层物理模型并提出每层的控制方程,验证了分层理论的合理性。通过大规模原子/分子大型并行模拟器仿真板间气膜内气体流态并计算沿高度方向的压力,得出了如下结论:随着板间气体流速的增大,板间气膜有效压力减小,连续流层的厚度增大,稀薄层的厚度减小;当气体流速到达一定值时,气膜内压力不再分层,速度滑移现象可以忽略。Stratification theory of the gas film was proposed herein,which was based on molecular motion and collision law of the gas in the film between plates.The film was divided into near wall layer,thin layer,continuous flow layer.And the basis for dividing thin layer and continuous flow layer was also given,in addition,physical model and its corresponding equations were proposed.Flow patterns and pressure distribution in the height direction were simulated and calculated by LAMMPS（large-scale atomic/molecular massively parallel simulator）.It is concluded that with increasing gas flow rate,the pressure of gas film is decreased,continuous flow layer thickness is increased,the thickness of the thin layer is decreased.There is no layered pressure in the gas film anymore,velocity slippage may be ignored.

关 键 词：微机电系统 微流体 速度滑移 Knudsen数 分子碰撞 

分 类 号：TH47[机械工程—机械制造及自动化]