复杂支承条件下分子泵转子动力学特性数值模拟与实验研究  

Experimental and Numerical Study on Rotor Dynamic Characteristics of the Molecular Pump under Complex Supporting Condition

作　　者：崔海龙[1] 刘洋[1] 陶继忠[1] 何朝辉[1] 

机构地区：[1]中国工程物理研究院机械制造工艺研究所,四川绵阳621900

出　　处：《机械设计与制造》2016年第8期69-72,76,共5页Machinery Design & Manufacture

基　　金：国家重大仪器设备开发专项"高速小型复合分子泵的开发与应用"(2013YQ130429)

摘　　要：为了有效提高复合分子泵转子系统的振动抑制效果,围绕与其密切相关的支承结构刚度特性展开研究。首先针对分子泵两端复杂支承条件,采用实验方法研究永磁轴承和橡胶减振垫的刚度特性;然后基于支承刚度特性建立分子泵转子系统数值模拟模型,采用模态分析法求解转子系统的特征频率及对应振型,采用谐频响应分析法求解转子系统在最大不平衡响应;最后搭建实验平台测试分子泵系统的振动特性。实验结果表明:所建立的数值模拟模型能够较好地预测分子泵转子系统的振动特性,合理设计分子泵支承结构能够有效提高分子泵转子系统的振动抑制效果。In order to improve the vibration suppression effect of the composite molecular pump rotor system,stiffness characteristics of supporting structure were investigated. For the complex supporting condition of molecular pump ,the stiffness characteristics of permament magnet bearings and rubber isolator by using experimental method. The numerical simulation model of molecular pump rotor system was established based on the supporting stiffness characteristics ,the characteristic frequency and corresponding vibration mode of molecular pump rotor system were solved by the modal analysis method,the maximum unbalance response of rotor system was solved by the frequency response analysis method. The vibration characterisiics of molecular pump were test. The experimental results show that the vibration characteristics of the molecular pump rotor system were predicted accurately by numerical simulation model,the vibration suppression effect of the molecular pump rotor system can be improved by optimization design of the supporting structure of the molecular pump.

关 键 词：分子泵 复杂支承 转子动力学 数值模拟 

分 类 号：TH212[机械工程—机械制造及自动化]