集成加速度传感器敏感芯片性能影响因素及其仿真分析  

Performance influencing factors and simulation analysis of sensitive chip of integrated acceleration sensor

作　　者：齐虹[1] 王明伟[1] 丁文波[1] 李玉玲[1] 王晓光[1] 

机构地区：[1]中国电子科技集团公司第四十九研究所,黑龙江哈尔滨150001

出　　处：《传感器与微系统》2016年第8期30-32,36,共4页Transducer and Microsystem Technologies

摘　　要：从集成加速度传感器敏感芯片结构参数的设计入手,分析了支撑梁厚度、电容初始间隙、质量块等敏感芯片结构参数对传感器灵敏度、非线性等性能的影响。同时利用结构分析软件ANSYS进行仿真分析,并对优化后的敏感芯片结构参数进行验证,结果表明:该结构的敏感芯片使加速度传感器灵敏度能够达到10 m V/gn以上,非线性优于2%。Start with structure parameter design of sensitive chip of integrated acceleration sensor,and analyze influence of sensitive chip structural parameters,such as thickness of supporting beam,initial gap of capacitor,and quality block on sensitivity,nonlinearity of sensor. Structure analysis software ANSYS is used for simulation analysis,meanwhile,structure parameter of the optimized sensitive chip is verified,result shows that,with the optimized sensitive chip,sensitivity of acceleration sensor can reach above 10 m V / gn,and nonlinearity of acceleration sensor is better than 2 %.

关 键 词：集成加速度传感器 敏感芯片 结构参数 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]