环境温度变化对夏克-哈特曼波前传感器测量精度影响分析  

Analysis of Effect of Ambient Temperature Variation on Measurement Accuracy of Shack-Hartmann Wavefront Sensor

作　　者：孟庆宾[1,2,3] 齐月静[1,2] 卢增雄[1,2] 苏佳妮[1,2] 高斐[1,2,3] 

机构地区：[1]中国科学院光电研究院,北京100094 [2]北京市准分子激光工程技术研究中心,北京100094 [3]中国科学院大学,北京100049

出　　处：《中国激光》2016年第8期248-255,共8页Chinese Journal of Lasers

基　　金：国家科技重大专项(2009ZX02206)

摘　　要：环境温度变化是影响夏克一哈特曼波前传感器（SHWS）测量精度的重要因素之一。采用Zemax软件热分析功能，分析了环境温度变化引起的微透镜阵列（MLA）变形及折射率变化、MLA和电荷耦合器件（CCD）间距变化以及球面波点源与SHWS间距变化对SHWS测量精度的影响。分析计算得出，环境温度变化引起的MLA和CCD间距变化是影响SHWS测量精度的主要因素，环境温度在21～24℃内每增加1℃，给测量结果带来的误差[均方根（RMS）]约为0．52nm。通过单模光纤衍射产生近于理想的球面波对SHWS测量精度进行实验验证，实验结果和仿真分析结果基本一致。Ambient temperature variation is one of the key factors that affect the measurement accuracy of Shack- Hartmann wavefront sensor （SHWS）. The influence of the distortion of micro-lens array （MLA） and the refractive index variation, the distance changes between MLA and charge coupled device（CCD）, and the distance change between spherical point source and SHWS on measurement accuracy of SHWS are analyzed by using the thermal analysis function of Zemax software, which is caused by ambient temperature variation. The analysis and calculation show that the main factor affecting the measurement accuracy of SHWS is the distance change between MLA and CCD caused by ambient temperature variation. The measurement error is 0.52 nm root mean square（RMS） when the ambient temperature rises every 1 ℃ from 21 ℃ to 24℃. The experiments of testing the measurement accuracy of SHWS are carried out by using a nearly perfect spherical wave generated by single mode optical fiber diffraction. The results obtained from simulation and experiment are basically identical.

关 键 词：测量 夏克-哈特曼波前传感器 环境温度 测量精度 

分 类 号：TH741[机械工程—光学工程]