多晶硅氢化炉热场部件革新  

The Innovation of Thermal Components for Polysilicon' s Hydrogenation Furnace

作　　者：罗平[1,2] 蔡永明[1] 顾国宝[1,2] 刘阳赞 

机构地区：[1]昆明冶研新材料股份有限公司,云南昆明650031 [2]云南省光电子硅材料制备技术企业重点实验室,云南曲靖655011

出　　处：《云南冶金》2016年第4期51-54,共4页Yunnan Metallurgy

基　　金：云南省科技厅国际科技合作专项(2013IA002)"电子级多晶硅产业化生产关键技术的联合研究"

摘　　要：多晶硅氢化炉热场部件是影响氢化炉稳定运行的关键因素,通过分析研究原有热场材料存在的缺陷,改进热场结构及材质,以提升热场部件使用寿命,确保氢化炉的稳定运行。The thermal components of polysilicong hydrogenation furnace is the critical influence factor for the stable operation of hydrogenation furnace, the thermal structure and material is improved through analysis on the existing defects of the thermal material, so that the life cycle of the thermal parts are improved and guaranteed, as well as the stable operation of the hydrogenation furnace.

关 键 词：多晶硅 氢化炉 保温罩 加热体 

分 类 号：TF066[冶金工程—冶金物理化学]