音叉式全解耦微机电陀螺的设计与仿真  

Design and simulation of tuning folk full decoupling type MEMS gyroscope

作　　者：李宇鹏[1] 王志飞[1,2] 刘来超 

机构地区：[1]燕山大学机械工程学院,河北秦皇岛066004 [2]徐州重工集团,江苏徐州221004 [3]北京机床研究所,北京101312

出　　处：《机械设计》2016年第8期33-37,共5页Journal of Machine Design

摘　　要：文中对严重影响微机电陀螺(简称微陀螺)灵敏度的机械耦合误差进行深层研究和分析,提出并设计了一种基于体硅制造的新型全解耦音叉式微陀螺仪。为实现新型微陀螺的驱动和检测模态完全解耦,在一定的带宽下保持较高的检测灵敏度,采用了新型敏感检测梁和对称的音叉式结构。根据微陀螺仪的实体模型建立了其动力学模型,应用两种空气阻尼模型对检测阻尼特性进行了研究和计算。通过多种固有模态的匹配仿真试验和谐响应分析,确定了新型微陀螺的检测方式和弹性梁结构参数。仿真结果显示,该新型陀螺实现了驱动和检测方向的完全独立,显著减小了机械耦合误差。The mechanical coupling error that affected the MEMS gyroscope （micro-gyroscope for short） sensitivity seriously was studied and analyzed deeply in this paper. A tuning fork MEMS gyroscope with full decoupling was presented based on fabricated by silicon bulk manufacturing. In order to achieve the full decoupling of driver and sense mode, a novel sensitive detection beam and symmetrical tuning fork structure were adapted. The detection sensitive could be kept higher under a certain bandwidth. The dynamic model of micro-gyroscope entity model was built and the detected damping characteristics was studied and calculated on the two kinds of air damping models. The detection method and the elastic beam structural parameters were determined through multi natural modal matching simulation experiments and harmonic analysis. The simulation results showed that the driver and sense direction of this new type gyroscope were completely independent, and the mechanical coupling error was greatly reduced.

关 键 词：微机电陀螺 完全解耦 滑膜阻尼 梳齿电容 模态仿真 

分 类 号：TH122[机械工程—机械设计及理论]