ZnO纳米薄膜及其声表面波传感器的制备与特性研究  

Study on preparations and characterizations of ZnO nano-structural films and related SAW sensors

作　　者：王艳[1,2] 张淑仪[2] 杨跃涛[2] 水修基[2] 

机构地区：[1]南京邮电大学电子科学与工程学院,南京210046 [2]近代声学教育部重点实验室南京大学声学研究所,南京210093

出　　处：《声学学报》2016年第5期568-574,共7页Acta Acustica

基　　金：国家青年科学基金项目(11304160);江苏省高校自然科学基金项目(13KJB140008);南京邮电大学基金项目(NY213018)资助

摘　　要：结合RF磁控溅射和水热合成法制备ZnO纳米结构薄膜,利用XRD及SEM分析ZnO薄膜的晶体结构和形貌、XPS分析薄膜的化学组分。结果表明,在适当的条件下,所制备的ZnO薄膜为具有良好c轴取向的纳米棒状结构,且ZnO纳米棒薄膜表面吸附的氧原子及晶格的氧空位缺陷增多。利用所制备ZnO纳米棒薄膜的上述特性,将其作为气体敏感材料。分别沉积于128°YX-LiNbO_3和36°YX-LiTaO_3基片,研制多层结构的声表面波(Rayleigh波和Love波)氢气传感器,并进行室温条件下氢气的实时传感检测,结果显示所研制的Love波传感器具有更高的灵敏度,性能更优化。ZnO nano-structural films are prepared by RF magnetron sputtering and hydrothermal synthesis. The crystal structures, morphologies and chemical compositions of the ZnO nano-scaled films are analyzed by XRD, SEM and XPS. The results show that the ZnO nanorods are well oriented along c-axis as the preparing conditions are suitably selected. Meanwhile, there are a lot of oxygen vacancies and adsorbed oxygen atoms in the ZnO nano-structural films, which are beneficial to be utilized as gas-sensing materials. Furthermore, SAW （Rayleigh wave and Love wave） sensors based on ZnO nanorod films deposited on 128° YX-LiNbOa and 36° YX-LiTaO3 piezoelectric substrates are fabricated and used for hydrogen sensing at room temperature. The results indicate that the Love wave sensors have superior sensing properties, such as high sensitivities.

关 键 词：声表面波传感器 ZNO薄膜 纳米薄膜 制备 特性 RAYLEIGH波 ZNO纳米棒 氢气传感器 

分 类 号：O484.1[理学—固体物理] TP212[理学—物理] TB383.1[自动化与计算机技术—检测技术与自动化装置]