计量型扫描电子显微镜测控系统研究  

Study on the Measuring and Control System of Metrological Scanning Electron Microscope

作　　者：张瑞军[1,2] 高思田[2] 李伟[2] 陈本永[1] 施玉书[2] 李琪[2] 

机构地区：[1]浙江理工大学,浙江杭州310018 [2]中国计量科学研究院,北京100029

出　　处：《计量学报》2016年第5期457-461,共5页Acta Metrologica Sinica

基　　金：国家科技支撑项目(2011BAK15B02)

摘　　要：为了解决扫描电子显微镜（SEM）在100nm以下的微纳几何结构尺寸精确测量方面的不足，实现SEM测量值的量值传递与溯源，研制了一套计量型SEM测控系统。该系统主要由位移台运动控制模块、激光干涉位移测量模块和图像采集与处理模块组成，基于LabVIEW图形编程语言开发了测控系统上位机软件。对1μm×1μm二维栅格样品进行尺寸测量实验，结果表明，该计量型SEM测控系统运行稳定可靠，且在10μm测量范围内的测量值示值误差优于10nm。In order to solve the deficiency in precise measurement of micro-nano geometry structure dimension under 100nm of scanning electron microscope（SEM） and realize the quantity transfer and traceability of measurement values, the control and measuring system of metrological SEM is developed. The system consists of the motion control module of positioning stage, the displacement measurement module based on laser interference method and the image acquisition and processing module. The control and measuring system software is developed based on LabVIEW graphical programming language. Finally the measurement experiment of 1μm×1μm two-dimensional grid sample is conducted with the system and the results show that the control and measuring system of metrological SEM is in good stability and the indication error of measurement values is better than 10 nm in the 10 μm measuring range.

关 键 词：计量学 计量型扫描电子显微镜 量值溯源 运动控制模块 激光外差干涉 图像采集与处理 LabVIEW 

分 类 号：TB92[一般工业技术—计量学]