微纳集成电路和新型混合集成技术  

Micro/Nano-scale integrated circuits and new emerging hybrid integration techniques

作　　者：曾晓洋[1] 黎明[2] 李志宏[2] 陈兢 杨玉超[2] 黄如[2] 

机构地区：[1]复旦大学微电子学院,上海201203 [2]北京大学信息科学技术学院,北京100871

出　　处：《中国科学：信息科学》2016年第8期1108-1135,共28页Scientia Sinica(Informationis)

摘　　要：随着摩尔定律的不断推进,集成电路产业迎来了巨大发展机遇的同时,也面临着前所未有的发展瓶颈和技术挑战.论文围绕创新的微纳集成电路和新型混合集成技术领域的基础理论和关键技术问题,聚焦在新型低功耗器件及电路理论,纳米尺度单片集成电路技术、微纳传感和异质集成融合技术等方向,开展了比较广泛和深入的国内外研究现状与发展趋势综述,旨在为人们提供一个相对全面的"后摩尔"时代集成电路创新理论与技术发展脉络图,也尝试为新型应用驱动的集成电路技术与产品开发描绘出新的路线图.As Moore＇s law advances, the integrated circuit（IC） industry is facing both unprecedented technical challenges and bottlenecks and good opportunities for development. This paper focuses on the innovative micro/nano-scale IC industry and the new hybrid integration technology. To this end, an extensive and profound survey of the current research status and trends in low power micro/nano-scale devices and circuits, nano-scale single-chip systems, MEMS/NEMS, and hybrid integration techniques is presented. In addition, a comprehensive roadmap for theoretical innovations and technical development of post-Moore era IC technology is given and a new roadmap for emerging application-driven IC products outlined.

关 键 词：集成电路 低功耗 微电子器件 系统芯片 混合集成 摩尔定律 

分 类 号：TN45[电子电信—微电子学与固体电子学]