退火温度对Zn0.93Fe0.07O薄膜微结构和铁磁性能的影响  

Effects of Annealing Temperature on Microstructure and Ferromagnetism of Zn_(0.93)Fe_(0.07)O Thin Films

作　　者：更藏多杰 马书懿[2] 陈万军[1] 张国恒[1] 陈彦[1] 

机构地区：[1]西北民族大学电气工程学院,电子材料国家民委重点实验室,兰州730030 [2]西北师范大学物理与电子工程学院,甘肃省原子分子与功能材料重点实验室,兰州730070

出　　处：《人工晶体学报》2016年第8期2152-2155,2171,共5页Journal of Synthetic Crystals

基　　金：中央高校基金(31920150011)

摘　　要：用射频磁控溅射方法在硅片上制备了Zn_(0.93)Fe_(0.07)O薄膜,并在空气中用不同温度进行热处理,利用X射线衍射仪和扫描电子显微镜对其微结构、表面和断面形貌进行测试。结果表明,薄膜沿c轴方向择优生长,呈六角纤锌矿结构,空气中450℃退火的样品XRD谱中出现最强的(002)衍射峰,晶粒尺寸变大,薄膜结晶和取向明显变好。用振动样品强磁计对样品铁磁特性进行测试,发现当退火温度的升高时,饱和磁化强度有所增加,并经分析认为这可能是薄膜中晶粒间的晶界缺陷引起的。Iron doped Zinc oxide （ Zn0.93Fe0.07O ） thin films were successfully deposited on Si wafer by radio frequency magnetron sputtering method, and annealed in the air with different temperature. The microstructure was detected by X-ray diffraction （ XRD ） , the surface/cross-section morphology was observed by Scanning electron microscopy （ SEM） , and the ferromagnetism of the films was measured by vibrating sample magnetometer （ VSM）. The experimental results demonstrate the hexagonal wurtzite structure of Zn0.93Fe0.07O thin films with highly c-axis preferential orientation. Moreover, when the annealing temperature is up to 450 ℃ , not only the strongest diffraction peak（002） was observed, but also the biggest grain size was obtained, indicate that the film＇s crystallinity and orientation are notably better. Furthermore, the ferromagnetism of Zn0.93Fe0.07O thin films at room temperature have been proved by the results of VSM measurement. It is found that the annealing temperature has certain influence on the ferromagnetic film. When the annealing temperature increasing, the saturation magnetization increases consequently, which may be caused by the grain boundary between defects in the thin film.

关 键 词：磁控溅射 Zn0.93Fe0.07O薄膜 退火温度 铁磁性 

分 类 号：O484[理学—固体物理]