线性渐变滤光片的制备方法研究  

Study on fabrication method of linear variable filter

作　　者：陈鹏[1,2] 罗露雯 盛斌[1,2] 黄元申[1,2] 

机构地区：[1]上海理工大学上海市现代光学系统重点实验室,上海200093 [2]上海理工大学光电信息与计算机工程学院,上海200093

出　　处：《光学仪器》2016年第4期308-312,共5页Optical Instruments

基　　金：国家自然科学基金资助项目(61378060;61205156;11105149);上海市教育委员会科研创新项目(14YZ095)

摘　　要：提出了一种离子束刻蚀制备线性渐变滤光片(LVOF)的方法。离子束刻蚀过程中,通过在样片和离子束出射窗口之间加入开有三角形透射窗口的挡板以及样片水平方向多次来回运动完成楔形谐振腔层制备,配合离子束辅助反应电子束真空镀膜技术,完成线性渐变滤光片的制作。设计三组不同刻蚀次数的制作实验,制作出了工作波长为500~580 nm、线色散系数为1.03 nm·mm^(-1)的线性渐变滤光片。实验结果表明,通过调节样品台运动速率或者刻蚀次数,能够制备出具有预期楔角谐振腔层的线性渐变滤光片。Method of fabricating linear variable optical filters （LVOF） by ion beam etching withmasking mechanisms has been proposed. A triangle-shaped mask is designed and set betweenthe ion source and sample. During the ion etching, the sample is moved back and forthrepeatedly with a constant velocity for purpose of obtaining the linearly varied thickness of thecavity. Combining with ion beam assistant thermal oxidative electron beam evaporationdeposition technology, the fabrication of LVOF can be completed. Three different times foretching during ion beam etching process were designed and performed. Filtering range lies in500-580 nm and line dispersion coefficient of 1. 03 nm · mm^-1 have been fabricated. Themeasured results indicated that by adjusting the scanning frequency and time of ion beametching, LVOFs which have anticipated wedge-shape resonant cavity can be obtained.

关 键 词：线性渐变滤光片(LVOF) 间隔层 离子束刻蚀 

分 类 号：O43[机械工程—光学工程]