结合椭圆偏振光谱与傅里叶红外光谱的宽禁带半导体薄膜光学特性表征（英文）  

Characterization of Optical Properties of Wide Band Gap Semiconductor Thin Film with the Combination of Ellipsometry and Infrared Spectrum

作　　者：谢灯[1,2] 丘志仁[2] 万玲玉[3] TIN Chin-che 梅霆[6] 冯哲川 XIE Deng QIU Zhi-ren WAN Ling yu TIN Chin-che MEI Ting FENG Zhe-chuan(Institute of Optoelectronic Material and Technology ,South China Normal University ,Guangzhou 510631 ,China State Key Laboratory of Optoelectronic Materials and Technologies and School of Physics ,Sun Yat Sen University, Guangzhou 510275,Cbina College of Physics Science ＆ Technology ,Guangxi Key Laboratory for the Relativistic Astrophysics, Laboratory of optoelectronic materials 8〉 detection technology ,Guangxi University, Nanning 530004, China Department of Mechanical Engineering ,University of Malaya, 50603 Kuala Lumpur ,Malaysia Department of Physics ,Auburn University ,Auburn ,Alabama 36849 ,U. S. A. The Key Laboratory of Space Applied Physics and Chemistry ,Ministry of Education and Shaana-i Key Laboratory of Optical Information Technology,School of Science, Northwestern Pol ytechnical University ,Xi＇ an 710072 ,China)

机构地区：[1]华南师范大学光电子材料与技术研究所,广州510631 [2]中山大学光电材料与技术国家重点实验室,物理学院,广州510275 [3]广西大学物理科学与工程技术学院,广西相对论天体物理重点实验室,光电子材料与探测技术实验室,南宁530004 [4]马来西亚大学机械工程系,马来西亚吉隆坡50603 [5]奥本大学物理学院,美国奥本36849 [6]西北工业大学理学院,教育部空间应用物理与化学重点实验室,陕西省光信息技术重点实验室,西安710072

出　　处：《光散射学报》2016年第3期214-219,共6页The Journal of Light Scattering

基　　金：中山大学光电材料与技术国家重点实验室开放课题;国家自然科学基金(11474365,61377055,61176085);国家自然科学基金(AE0520088);广东高校国际科技合作创新平台项目(gjhz1103);广西相对论天体物理重点实验室广西自然科学基金创新团队项目(2013GXNSFFA019001)

摘　　要：宽禁带半导体薄膜,包括碳化硅,氮化镓和氧化锌及其化合物以及异构体,带隙普遍在3.2eV以上,一阶声子特征峰在100至1500cm^(-1)之间。确定能带宽度和声子特征峰有很多方法,比如光致发光、拉曼散射、光学透射谱等,我们提出了一种结合椭圆偏振光谱与红外傅里叶反射谱进行传输矩阵分析的方法,能够同时确定从紫外波段(约250nm)到远红外波段(约22000nm)的薄膜材料色散关系和膜厚。我们构建了基于谐振子的光学函数模型,并论证这个模型很适合用于模拟由各种不同波长入射光波造成的共振吸收。Wide band gap semiconductor films,including silicon carbide（SiC）,gallium nitride（GaN）,zinc oxide（ZnO）and their compounds and isomers,posess a band gap larger than 3.2eV,and the characteristic phonon peak lies between 100 and 1500cm（-1）.There are many methods to determine the band width and the characteristic phonon peaks,such as photoluminescence,Raman scattering and optical transmission spectra etc.Here we propose a combination of spectroscopic ellipsometry and Fourier transform infrared reflection spectrum analysisby transfer matrix method,which can determine the dispersion spectra and film thickness simultaneously,ranging from ultra-violet（around 250nm）to far infrared（about 22000nm）.We construct an optical function model based on harmonic oscillator,and demonstrate that the model is suitable for simulating the resonance absorption of incident light with various wavelengths.

关 键 词：椭圆偏振光谱 傅里叶红外光谱 传输矩阵方法 

分 类 号：O433.3[机械工程—光学工程]