基于柔性电极结构的薄膜电容微压力传感器  

Thin Film Capacitive Micro-Pressure Sensors Based on Flexible Electrode Structure

作　　者：姚嘉林[1,2,3] 江五贵[1] 邵娜[2,3,4] 史云胜[2,3,5] 田佳丁 杨兴[2,3] 

机构地区：[1]南昌航空大学航空制造工程学院,南昌330063 [2]清华大学精密仪器系,北京100084 [3]清华大学精密测试技术及仪器国家重点实验室,北京100084 [4]南昌航空大学信息工程学院,南昌330063 [5]军械工程学院电子与光学工程系,石家庄050003

出　　处：《传感技术学报》2016年第7期977-983,共7页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(51375263);国家自然科学基金项目(11162014)

摘　　要：基于柔性电极结构,本文设计、制作了薄膜电容微压力传感器,在阐述传感器工作原理的基础上,提出了两种设计思路,即基于柔性纳米薄膜的电容式微压力传感器和具有微结构的柔性电极薄膜电容式微压力传感器,并结合传感器的结构和柔性材料的加工特性,进一步提出了相应的力敏特性材料结构优化思路和加工流程,利用该流程得到了一种结构轻薄、工艺简单、高灵敏度的微压力传感器。经测试,本文制作的压力传感器的灵敏度能够达到218 f F/mm Hg,在智能穿戴和可植入压力检测等领域显示出较好的应用前景。A novel thin film capacitive micro-pressure sensor was designed and fabricated based on a flexible electrode structure. On the basis of the working principle of film capacitive pressure sensor,two kinds of designs for the capacitive micro-pressure sensor were proposed：one was based on flexible nano-films and the other was based on the flexible electrode films that with micro-structure. Meanwhile,an optimal method of the sensitivity of the pressure sensor was proposed to achieve a slimmer,simpler and more sensitive capacitive pressure sensor according to the structural feature of the micro-pressure sensor and the processing property of the flexible materials. According to the experiments,the maximum pressure sensitivity of the proposed sensor can reach 218 fF/mmHg,which shows a promising application prospect in many industrial fields such as smart wearable devices as well as implantable medical pressure sensing.

关 键 词：柔性MEMS 电容式 压力传感器 柔性电极 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]