对称分布的三轴谐振陀螺仪的设计、分析与仿真  

Design,Analysis and Simulation of the Symmetrical Distribution of Three Axis Resonant Gyroscope

作　　者：陈竟成[1] 许高斌[1] 马渊明[1] 陈兴[1] 

机构地区：[1]合肥工业大学电子科学与应用物理学院,安徽省MEMS工程技术研究中心,合肥230009

出　　处：《传感技术学报》2016年第9期1335-1340,共6页Chinese Journal of Sensors and Actuators

基　　金：国家863计划项目(2013AA041101)

摘　　要：为了实现单片集成三轴陀螺仪,提出了一种完全对称的四方陀螺结构。介绍了该陀螺的结构设计及工作原理,给出了动力学简化模型,并给出了其动力学方程的详细推导。运用Ansys软件对陀螺结构进行了静态分析和模态分析,仿真结果表明,陀螺在施加100 GHz载荷下所受最大应力为1.942 MPa,陀螺各模态的固有频率分别为57.345 k Hz、57.382 k Hz以及57.395 k Hz,各模态间匹配性能较好。对陀螺结构的仿真研究的结果表明其抗过载及模态匹配满足陀螺的设计要求。A square symmetrical tri-axis gyroscope structure was proposed to realize the monolithic integrated threeaxis gyroscope. Firstly,the idea of design and working principle of the gyroscope was introduced,while the dynamicmodel with its dynamic equation was given. Then,the structure static analysis and modal analysis was simulated byusing the Ansys software. The simulation results shows that the maximum stress under the applied load of 100 GHZ under load is 1.942 MPa,while the Natural frequencies of each mode are 57.345 k Hz,57.382 k Hz and57.395 k Hz,which means that the matching performance between modal is good. The simulation for this gyroscopestructure demonstrate that the mode matching performance and resistance to overload and meet the design require-ments for the tri-axis gyroscope.

关 键 词：三轴陀螺 对称 动力学分析 抗过载 模态匹配 

分 类 号：TB33[一般工业技术—材料科学与工程]