俄歇电子能谱仪在氧化铜定量分析中的应用  

Application of Auger Electron Spectroscopy in Quantitative Analysis of CuO

作　　者：肖红[1] 李芳芳[1] 陆雷[1] 曾荣光[1] 吕学超[1] 钟永强[1] 

机构地区：[1]中国工程物理研究院材料研究所,江油621907

出　　处：《理化检验（物理分册）》2016年第9期642-645,共4页Physical Testing and Chemical Analysis(Part A:Physical Testing)

摘　　要：将基体效应修正引入到俄歇电子能谱仪定量分析中,基于Monte Carlo模拟和TPP-2M模型进行了氧化铜样品中各元素背散射因子和非弹性平均自由程的计算,对氧化铜标样在相同条件下重复10次进行俄歇能谱试验。将修正因子引入到氧化铜标样的俄歇定量分析中,基体效应修正后,氧化铜中各元素含量的相对误差大大减小,俄歇定量分析的精确度有很大提高。The matrix effect corrections were considered in quantitative analysis by Auger electron spectroscopy （AES）. Based on Monte Carlo simulation and TPP-2M model, the Auger electron backscattering factor and inelastic mean free path for copper and oxygen elements in CuO were calculated. Also, the CuO standard sample was measured by AES for ten times under the same test condition. The matrix effect correction factors were introduced into AES quantitative analysis. It was observed that the relative errors of the element contents in CuO sample were greatly reduced by the matrix effect correction, and the accuracy of AES quantitative analysis was increased greatly.

关 键 词：俄歇电子能谱 定量分析 氧化铜 基体效应修正 背散射因子 非弹性平均自由程 

分 类 号：O657.62[理学—分析化学]