原位溅射型单次试开密码鉴别电路  

In-situ sputtering type single-try discriminator circuit

作　　者：王宇航[1,2] 高杨[3,4] 韩宾[1] 贾乐[1] 

机构地区：[1]西南科技大学信息工程学院,四川绵阳621010 [2]核探测与核电子学国家重点实验室,北京100049 [3]中国工程物理研究院电子工程研究所,四川绵阳621999 [4]重庆大学新型微纳器件与系统技术国防重点学科实验室,重庆400044

出　　处：《强激光与粒子束》2016年第11期128-132,共5页High Power Laser and Particle Beams

基　　金：国家自然科学基金项目(61574131);中国工程物理研究院超精密加工技术重点实验室基金项目(2014ZA001);核探测与核电子学国家重点实验室开放课题基金项目(2016KF02);西南科技大学特殊环境机器人技术四川省重点实验室开放基金项目(14zxtk01)

摘　　要：针对目前微机电系统密码锁中的鉴别器结构复杂、智能电子密码锁可靠性不高的问题,设计了一种N bit的原位溅射型单次试开密码鉴别电路。N bit的密码鉴别电路,由2 N(N级、每级2个)个原位溅射型OFF-ON开关按照每级"二选一"的逻辑、N级级联的形式构成;将原位溅射型OFF-ON开关(OFF态到ON态的单向切换具有不可逆特性)与具有熔断特性的保险丝按照装定密码对应的电路关系进行连接,构成了原位溅射型单次试开固态密码锁,可将此密码锁用于对安全性要求高的要害系统、设施中。为了获得原位溅射型OFF-ON开关中金属爆炸箔与叉指电极之间的间隙,给出了三种固态密码鉴别电路的微加工工艺方案。As the structure of discriminator in the current micro-electromechanical system combination lock is complex and the reliability of electronic combination locks is poor,we designed an N bit in-situ sputtering single-try discrimination circuit to solve these problems.The N bit discrimination circuit is composed of 2 N（N-stage,two switches per stage）sputtering type OFF-ON switches and formed by alternative logic of each stage and N-stage series.The sputtering type OFF-ON switches（the one-way switch of the OFF state to ON state is irreversible）and the fuse having a fusing characteristic are connected by the corresponding relationship between setting password and the circuit to form in-situ sputtering and single-try solid combination lock which can be used in high security key systems and facilities.In order to ensure a space between the metal exploding foil and the interdigital electrode,three different micromachining process methods of the discrimination circuit are presented.

关 键 词：微电子机械系统 原位溅射 鉴别电路 密码锁 单次试开 

分 类 号：TJ430.3[兵器科学与技术—火炮、自动武器与弹药工程] TJ430.2