基于硅微通道板的CoNiP微米管阵列的磁性  

Magnetic Property of the CoNiP Micro-Tubes Arrays Based on the Silicon Micro-Channel Plates

作　　者：童新[1,2] 连柯楠[1,2] 付梦秋 谭人玮[2] 赵振杰[3] 熊大元[1] 徐少辉[1,2] 朱一平[2] 王连卫[1,2] 

机构地区：[1]华东师范大学上海市多维度信息处理重点实验室,上海200241 [2]华东师范大学极化材料与器件教育部重点实验室,上海200241 [3]华东师范大学物理与材料科学学院,上海200062

出　　处：《微纳电子技术》2016年第11期751-756,共6页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(61176108);上海市科学技术委员会资助项目(14DZ2260800)

摘　　要：利用压差液流法在硅微通道板(MCP)孔道内侧壁上沉积钴镍磷(CoNiP)软磁性材料,制备了钴镍磷微米管阵列。比较了液流沉积与直接水热法沉积两种工艺方法,验证了液流法对于宏多孔硅化学沉积的优化。以不同方式对所得样品进行退火,观察平行和垂直于微米管长轴方向的矫顽力和剩磁比(Mr/Ms),发现垂直于微米管阵列长轴方向的剩磁比明显大于平行于微米管阵列长轴方向的,这表明制备样品的易磁化方向为垂直于微米管阵列长轴的方向,同时电流退火使垂直和平行于微米管长轴方向的矫顽力的大小关系发生反转。Cobalt-nickel-phosphorus（CoNiP）soft magnetic materials were deposited on the side walls in the hole channels of the Si micro-channel plate（MCP）with the differential pressure drop flowing deposition method,then the CoNiP micro-tubes arrays were obtained.Besides,the direct hydrothermal deposition was employed to deposit the CoNiP in the channel of the Si MCP for comparison,verifying the optimization of the drop flowing deposition method to the chemical deposition of the macro porous silicon.The obtained samples were annealed with different methods.By observing both the coercivity and remanence ratio（Mr/Ms）in parallel and perpendicular to the long axis direction of the micro-tubes,it is found that the ratio of the residual magnetization and saturation magnetization in perpendicular to the long axis of the micro-tubes is obviously higher than that inparallel to the long axis of the micro-tubes.The result indicates that the axis of the easy magnetization for the sample is perpendicular to the long axis of the microtubes arrays.Meanwhile,the current annealing induces the completely reversal in the magnitude relationship of the coercive in perpendicular and parallel to the long axis direction of the microtubes.

关 键 词：硅微通道板(Si-MCP) 高深宽比 微米管阵列 液流沉积 易磁化方向 

分 类 号：O482.54[一般工业技术—材料科学与工程] TM27[理学—固体物理]