用于蓝宝石光盘的数字化数据存储  

Data recording in digital form on sapphire optical disk

作　　者：付明磊[1,2] 徐武超 乐孜纯[1,2] 伊凡.高博夫 德米特罗.曼科 FU Ming-lei XU Wu-chao LE Zi-chun GORBOV Ivan MANKO Dmytro(College of Science, Zhejiang University of Technology, Hangzhou 310023, China Institute for information recording ,NAS of Ukraine ,Kiev 03113 ,Ukraine Yiwu Academy of Science and Technology ,Zhejiang University of Technology ,Yiwu 322001 ,China)

机构地区：[1]浙江工业大学理学院,浙江杭州310023 [2]浙江工业大学义乌科学技术研究院,浙江义乌322001 [3]乌克兰国家科学院信息记录研究所,乌克兰基辅03113

出　　处：《光学精密工程》2016年第10期2456-2461,共6页Optics and Precision Engineering

基　　金：国家高端外国专家资助项目(No.GDT20153300054);浙江省公益性技术应用研究计划资助项目(No.2015C34011)

摘　　要：为了解决长时数据存储的难题,开展了以数字格式在蓝宝石光盘表面写入数据的研究工作。根据艾林方程,分析了利用常用无机材料进行数据存储的数据失效时间。描述了在蓝宝石材料为基底的光盘上以数字格式记录数据的基本工艺流程,重点介绍了用于蓝宝石光盘的离子束刻蚀系统。实验结果显示,蓝宝石光盘表面刻蚀的信息坑宽度为0.6μm,深度为0.2μm,磁道节距为1.6μm,符合ISO/IEC 10149:1995规定的CD-ROM格式数据存储要求,表明采用本文提出的方法实现蓝宝石光盘的数字化数据存储是可行的。此外,这种基本工艺流程不仅适用于蓝宝石光盘,同样适用于其它以高度稳定的材料(如石英玻璃)作为基底的光盘。To achieve long-term data storage on a sapphire optical disk,this paper researches how to record data on the sapphire optical disk surface in a digital form.On the basis of Eyring equation,the time-to-failure of data recording on the substrates made of inorganic materials was estimated.The data recording process on the sapphire optical disk with the substrate made of sapphire in digital form was introduced.Dry etching techniques as well as an ion beam etching system were emphasized.Experimental results show that the width and depth of a pit on the optical disk are 0.6μm and 0.2μm,respectively,the track pitch is 1.6μm,and those parameters of the pits on the surface of sapphire optical disk are in compliance with that of CD-ROM form defined by ISO/IEC 10149：1995standard.These results demonstrate that the proposed method is feasible to realize data recording in digital form on sapphire optical disks.The method is not only suitable for the sapphire optical disk,but also forother optical disks with substrates made of high stable materials（such as quartz glass）.

关 键 词：蓝宝石光盘 光学数据存储 长时数据存储 干法刻蚀 

分 类 号：TQ597[化学工程—精细化工]