结构光检测大型止推环止推面平面度探究  

A Preliminary Based on Structured-Light for Flatness Measurement of Large Annular Planes

作　　者：何文彦[1,2] 曹学东[1] 匡龙[1] 张鹏[1] 

机构地区：[1]中国科学院光电技术研究所,成都610209 [2]中国科学院大学,北京100049

出　　处：《光电工程》2016年第11期7-12,共6页Opto-Electronic Engineering

基　　金：国家863高技术项目

摘　　要：为指导高精度大型止推面加工,需要对其平面度进行面采样测试。本文建立了结构光检测模型:激光器投射平行条纹到被测表面,CCD相机接收包含条纹的图像。被测面理想的情况下,CCD相机接收到直条纹;当被测面存在凹凸时,条纹发生扭曲,扭曲量和高度存在比例关系。论文推导了结构光检测一体式装置的数学模型,分析了入射角对测量精度的影响。实验结果表明,入射角越大,系统分辨力越高;当入射角度继续增大时,检测精度有望达到要求,然而图像畸变严重,处理困难。论文提出改进分体式检测装置,CCD相机固定在待测面正上方,线激光阵列以相同角度入射。在入射角为85°时,对400 mm×400 mm的平面检测时,采用4 096 pixel×4 096 pixel的CCD,借助亚像素技术,结构光检测系统分辨力可以达到亚微米级别。In order to meet the requirement of high precision when large annular trust plane is gridding, surface sampling is required for flatness. Joint model of measurement based on structured light was propounded. The projector transmitted parallel fringes onto the measured plane, CCD camera caught the images including fringes. When the measurement plane was perfect, CCD camera would catch straight fringes. When there was convex and concave in the palne, the fringes CCD caught would be distorted. There was a set proportional relationship between the distortion and the relative height of the measured point. This paper derived combined model of Structured Light, analyzed the effect of incident angle to the precision. Result of experiment showed： the more incident angle, the higher the precision. As the incident angle increased, the precision would meet the required precision. However, as the incident angle increased, the image was twisted severely and hardly dealt with. A develop model was propounded. CCD camera was located above the measured plane, and array laser scanned the measured plane from a set incident angle. Helped by sub-pix, when the plane with size 400 mm×400 mm was measured, CCD 4 096 pixel×4 096 pixel applied, incident angle 85°, the precision will be the level of submicron.

关 键 词：大面型 平面度 面采样 线结构光 

分 类 号：TN247[电子电信—物理电子学]