胶体微球单层薄膜的制备、表征及应用  

Fabrication,Characteristics and Application of Monolayer Colloidal Microsphere Film

作　　者：黄江柱 黄华茂[1,2] 胡晓龙[1] 王洪[1,2] 

机构地区：[1]华南理工大学广东省光电工程技术研究开发中心,广东广州510640 [2]广州现代产业技术研究院,广东广州511458

出　　处：《光学与光电技术》2016年第6期77-81,共5页Optics & Optoelectronic Technology

基　　金：863国家高技术研究发展计划(2014AA032609);国家自然科学基金(61404050);广东省重大科技专项(2014B010119002);中央高校基本科研业务费专项资金(2015ZM131)资助项目

摘　　要：为使用大面积均匀分布的微球掩模制作纳米柱LED,对胶体微球单层薄膜的自组装技术进行了研究。采用旋涂法、滴定法和气液界面法,对2μm和455nm两种粒径的胶体微球进行自组装实验,并使用扫描电子显微镜进行观察和比较,分析了三种方法的优缺点。实验结果表明,旋涂法在制备过程中容易出现多层堆积现象;滴定法容易形成单层薄膜,但胶体微球较为稀疏;气液界面法可以实现较大面积的单层薄膜,胶体微球均匀分布,而且适用于各种基片,是一种简单有效的自组装方法。优选气液界面法,在GaN基LED外延片上制备了均匀分布的纳米柱结构,验证了这种方法用于纳米柱LED芯片制备的可行性。In order to form a large area orderly microsphere lithography mask for the fabrication of nanorod light-emitting di- odes （LEDs）, the self-assembly techniques of monolayer colloidal microspheres are explored. The spin-coating method, liq- uid dropping method, and gas-liquid interracial method are selected for self-assembly experiment using two kinds of colloidal microspheres with the sizes of 2/xm and 455 nm. The scanning electron microscope is used for profiles observation and results comparison. The advantages and disadvantages of these three methods are analyzed. It is shown that the spin-coating method is easy to obtain a multilayer microsphere film. Although the liquid dropping method may form a monolayer film, the distri- bution of colloidal microspheres is relatively sparse. Gas-liquid interracial method can achieve a large area of the monolayer film, of which the colloid microspheres are distributed uniformly. Moreover, the method is suitable for various substrates. In a word, gas-liquid interfacial method is a simple and effective method of selbassembly. Finally, this method is selected to fabricate the nanorod structures with uniformly distribution on GaN-based LED epitaxial wafers, and is demonstrated in the fabrication of nanorod LEDs.

关 键 词：胶体微球 自组装技术 气液界面法 纳米柱LED 微球掩膜 

分 类 号：TN303[电子电信—物理电子学]