柔性衬底沉积AZO/Ag/AZO透明导电薄膜及其光电性能研究  

Preparation and Photoelectric Property of AZO/Ag/AZO Flexible Thin Films

作　　者：周丽丹[1] 胡洁[1] 朱刚毅 陈少飞[1] 何依婷[1] 江绍基[1] 

机构地区：[1]中山大学光电材料与技术国家重点实验室,广东广州510275 [2]广东腾胜真空技术工程有限公司,广东肇庆526020

出　　处：《光学与光电技术》2016年第6期82-86,92,共6页Optics & Optoelectronic Technology

基　　金：广东省省部产学研合作专项资金(2013B090200042)资助项目

摘　　要：为了满足透明导电薄膜轻便、可折叠、高分辨率及快速响应的需求,在AZO单层透明导电薄膜研究基础上,尝试在柔性PET衬底上制备AZO/Ag/AZO三层透明导电薄膜。先利用光学薄膜设计软件对膜系进行设计优化,再参照此优化值制备研究不同AZO、Ag层对AZO/Ag/AZO薄膜光电性能的影响。通过合理的实验设计与对比,发现在柔性PET衬底上制备的三层AZO薄膜与在硬质衬底上制备的薄膜光电性能相当,且当三层AZO/Ag/AZO薄膜中AZO层厚度在40~45nm,Ag层厚度8nm时,在可见光波段的透过率高达到92%,电阻率低至4.0×10^(-5)Ω·cm,透明导电薄膜的品质因子最高为12.6×10^(-2)Ω^(-1)。得到的AZO/Ag/AZO三层透明导电薄膜具有与常见的ITO薄膜相比拟的性能。To meet the transparent conductive oxide films＇ lightweight, foldable, high resolution and fast response demand, AZO/Ag/AZO trilayers film on flexible substrates is prepared. By use of the optical thin-film design software, an optimiza- tion of its coatings is obtained. By refering to this optimal value, the impact of the thickness of AZO and Ag layers for AZO/ Ag/AZO trilayers film＇s characteristics and properties are explored. Through rational experiment design and contrast, it is found that trilayer AZO thin films deposited on PET substrate has high transmittance, low resistivity as on rigid glass sub- strate. And when the AZO layer at thickness about 40-45 nm, the inner Ag layer at thickness of 8 nm exhibits the highest average visible transmittance of 92- and the lowest resistivity of 4. 0 x 10-5 Ω·cm. The highest merit of TCO quality （12. 6 x 10-2 fΩ·cm means the trilayer AZO thin films has potential for research and application.

关 键 词：透明导电薄膜 三层结构AZO薄膜 柔性衬底 直流磁控溅射 膜系优化 

分 类 号：O484.4[理学—固体物理]