304不锈钢化学机械抛光工艺参数研究  

Chemical mechanical polishing process parameters of 304 stainless steel

作　　者：李庆[1] 陈绍坤 彭亚男[1] 秦洪权 付素芳[1] 苏建修[1] 

机构地区：[1]河南科技学院机电学院,河南新乡453003 [2]驻马店技师学院机械工程系,河南驻马店463000 [3]河南理工大学机械与动力工程学院,河南焦作454000

出　　处：《金刚石与磨料磨具工程》2016年第5期21-25,共5页Diamond & Abrasives Engineering

基　　金：国家自然科学基金面上项目资助(NO.51375149)

摘　　要：为优化抛光效果、节省成本及提高效率,研究抛光压力、抛光液流量、抛光转速和抛光时间对304不锈钢材料去除率和表面粗糙度的影响。实验结果表明:在抛光压力为13.79kPa、抛光液流量为15mL/min、抛光时间为35min、抛光转速为60r/min的工艺条件下,304不锈钢去除速率达到226.56nm/min,表面粗糙度降至6nm,既节约了成本又保证了最好的表面粗糙度和较高的材料去除速率。When chemical-mechanically polishing 304 stainless steel,the effects of polishing pressure,polishing slurry flow rate,polishing speed and polishing time on the material removal rate and surface roughness are studied for better performance,lower cost and higher efficiency.Experimental results show that the material removal rate reaches 226.56nm/min and the surface roughness reduces to 6nm at the condition of polishing pressure 13.79 kPa,slurry flow rate 15mL/min,polishing time 35 min,and polishing speed 60r/min,which ensures the best surface rough degree and higher material removal rate.

关 键 词：化学机械抛光 304不锈钢片 材料去除率 表面粗糙度 

分 类 号：TG58[金属学及工艺—金属切削加工及机床]