硅基波导光栅耦合器件的测试与分析  

Testing and Analyzing Silicon Waveguide and Grating Coupler Based on the Fiber-Waveguide Testing Platform

作　　者：杨俊波[1] 周唯[1] 张华良[1] 吴闻军 黄杰[1] 陈丁博 张晶晶[1] 韩云鑫[1] 

机构地区：[1]国防科学技术大学,湖南长沙410073

出　　处：《大学物理实验》2016年第6期9-14,共6页Physical Experiment of College

基　　金：教育部新世纪优秀人才支持计划(NCET-12-0142);湖南省自然科学基金(13JJ3001)

摘　　要：本文利用光纤-波导测试系统对微纳光子器件-亚波长光栅耦合器和波导进行测试;该测试系统具有50nm的调节精度,x、y和z三方向六轴自由度,并且能够控制信号光的入射角度;该系统包括:可调谐激光器、偏振控制器、拉锥光纤、微动调整平台、显微系统、红外相机和光功率计等;通过手动微调和精确对位,能够对微纳器件的耦合效率和插入损耗等性能进行测试;硅基波导光栅耦合器件的测试与分析对微纳光电子器件的设计具有一定的指导意义,能够广泛应用于光通信和光信息处理领域。Micro-nano optoelectronic devices play an important role in the filed optical communication,optical information processing,biological sensor,and high performance computing and so on. The fiber-waveguide testing platform is used to analyze the properties of micro-nano devices including crosstalk,insertion loss,coupling efficiency etc. It consists of a tunable laser,a polarization controller,a lensed fiber,x/y/z axis step-motor,optical power meter and so on,whose precision can reach up to 50 nm. Using the fiber-waveguide testing system to analyze the coupling efficiency of subwavelength grating and the loss of waveguide,we propose a testing method,which can be used in optical communication and optical interconnect network.

关 键 词：光纤-波导测试系统 光波导 SOI 串扰 插入损耗 

分 类 号：TN256[电子电信—物理电子学]