GaAs基多结太阳电池TiO_2/Al_2O_3/SiO_2减反射膜的设计与制备  

Design and Fabrication of TiO_2/Al_2O_3/SiO_2 Antireflection Coating for GaAs-Based Multi-Junction Solar Cells

作　　者：付蕊[1] 陈诺夫[1] 白一鸣[1] 涂洁磊[2] 刘虎[1,3] 马大燕[1] 陶泉丽 陈吉堃[4] 

机构地区：[1]华北电力大学可再生能源学院,北京102206 [2]云南师范大学太阳能研究所,昆明650500 [3]石家庄铁道大学数理系,石家庄050041 [4]北京科技大学材料科学与工程学院,北京100083

出　　处：《微纳电子技术》2017年第1期38-42,共5页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(61006050;61076051);北京市自然科学基金资助项目(2151004);国家高技术研究发展计划(863计划)资助项目(2011AA050507);中央高校基本科研业务费专项资金资助项目(13ZD05)

摘　　要：宽光谱低反射率减反射膜对提高GaAs基多结太阳电池的光电转换效率至关重要。设计和制备了宽光谱TiO_2/Al_2O_3/SiO_2三层减反射膜。理论研究发现,当TiO_2/Al_2O_3/SiO_2三层减反射膜最佳物理厚度为41.74 nm/78.74 nm/94.98 nm时,在350~1 800 nm宽光谱范围内获得最小有效反射率为2.85%。依据理论设计,采用真空电子束蒸发法制备了相应厚度的TiO_2/Al_2O_3/SiO_2三层减反射膜,分光光度计测试结果表明,在350~1 800 nm宽光谱范围内,有效反射率为7.21%,且在485 nm和850 nm波长附近获得反射率极小值4.39%和2.16%。The antireflection coatings with low reflectivity in the broadband spectrum are essential to improve the photoelectric conversion efficiency of GaAs-based multi-junction solar cells.The TiO_2/Al_2O_3/SiO_2triple-layer broadband antireflection coating were designed and fabricated.The theoretical results show that when the optimal physical thicknesses of the TiO_2,Al_2O_3 and SiO_2layers of the antireflection coating are 41.74,78.74 and 94.98 nm respectively,the minimum effective reflectivity is 2.85%in the broadband spectrum from350 nm to 1 800 nm.Based on the theoretical design,the TiO_2/Al_2O_3/SiO_2 triple-layer antireflection coating with the same thicknesses was fabricated by the vacuum electron beam evaporation method.The spectrophotometer test results show that the effective reflectivity is 7.21% in the broadband spectrum of 350-1 800 nm,and the minimum reflectivities of 4.39% and 2.16% are obtained around the wavelengths of 485 nm and 850 nm,respectively.

关 键 词：GaAs基多结太阳电池 TiO2/Al2O3/SiO2减反射膜 反射谱 电子束蒸发 有效反射率 

分 类 号：TM914.4[电气工程—电力电子与电力传动] O484.4[理学—固体物理]