光电编码器检测装置研究现状与展望  

Current Developing Situation and Trend of Measurement Devices of Photoelectric Encoder

作　　者：刘小树 万秋华[1] 王树洁[1] 杨守旺[1] 孙莹[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,长春130033 [2]中国科学院大学,北京100049

出　　处：《半导体光电》2016年第6期763-769,共7页Semiconductor Optoelectronics

基　　金：中国科学院知识创新工程领域前沿项目(070Y32R070)

摘　　要：随着科学技术的发展,各个研究单位对编码器的精度要求越来越高,因此,在编码器研制生产过程中,需要对其误差进行检测,虽然现有检测装置能够完成编码器的误差检测,但都存在着不足之处。文章在参考大量文献的基础上,首先介绍了光电编码器的原理,其次介绍了国内外编码器检测装置的结构及原理,并分析其优缺点,最后对其发展方向进行了展望。With the rapid development of science and technology,more and more precision requirements are proposed by different institutions,therefore,the precision of the encoders must be tested during the design and manufacturing process.Most of the measurement systems are capable of error measurement,but they are soured by certain drawbacks.In this paper,the principles of photoelectric encoders are presented. Measurement devices adopting different designs and principles are summarized,their merits and drawbacks are analyzed,and the future developing trends are discussed.

关 键 词：光电编码器 误差 检测装置 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]