不同PVD技术沉积TiN涂层的形貌和力学性能研究（英文）  

Morphology and Mechanical Properties of TiN Coatings Prepared with Different PVD Methods

作　　者：王明娥[1,2] 马国佳 刘星 董闯[1] 

机构地区：[1]大连理工大学,辽宁大连116024 [2]北京航空工业制造研究所高能束流加工技术重点实验室,北京100024

出　　处：《稀有金属材料与工程》2016年第12期3080-3084,共5页Rare Metal Materials and Engineering

基　　金：National Instrumentation Grant Program(2011YQ120039)

摘　　要：采用阴极弧沉积、中频磁控溅射及二者的复合技术在GCr15基底上制备了TiN涂层。通过扫描电镜、XRD谱、微米划痕测试、硬度测试以及摩擦磨损测试对涂层的组织结构和力学性能进行了表征及对比。结果表明,采用复合磁控阴极弧技术制备的TiN涂层具有较好的综合性能,如较光滑的表面、较高的结合力和硬度,故磨损率较低。TiN coatings were prepared on the GCr15 substrate by the cathode arc deposition, medium frequency magnetron sputtering and their composite methods. The coatings were characterized by scanning electron microscope（SEM）, X-ray diffraction（XRD） spectroscopy, microscratch test, friction and wear test. Moreover, the effects of different preparation methods on the structure and mechanical properties of the coatings were compared. The results show that the coating prepared by the composite method of arc and magnetron possesses a smooth surface and better comprehensive properties such as high cohesion and hardness; thus the wear rate is lower.

关 键 词：物理气相沉积 TIN涂层 摩擦磨损 复合沉积 

分 类 号：TG174.4[金属学及工艺—金属表面处理]