皮秒激光微纳加工研究进展  

Research Progress of Micro-Nano Fabrication by Picosecond Laser

作　　者：杨冬冬[1] 蔡京辉[1] 

机构地区：[1]中国科学院理化技术研究所空间功热转换技术重点实验室,北京100190

出　　处：《激光与光电子学进展》2017年第1期34-43,共10页Laser & Optoelectronics Progress

基　　金：国家863计划(2011AA12A103)

摘　　要：皮秒激光具有皮秒(10^(-12) s)量级的脉冲宽度,与电光弛豫时间(10^(-6)~10^(-12) s)相当或比电光弛豫时间更短。皮秒激光与材料作用时,由于电子来不及将能量传递给晶格,以至于整个加工过程中几乎没有热作用的存在,被称为"冷烧蚀"过程,因此皮秒激光在航空航天、国防、材料、医学、生物等领域的精密加工中有广泛的用途。简要介绍了研制适用于微纳加工的皮秒激光器的技术路线,综述了皮秒激光在高硬度金属精密制孔、硬脆性材料切割以及材料表面选择性去除方面的研究进展,探讨了目前皮秒激光微纳加工存在的问题,并展望了其可能的发展方向。Picosecond laser has picosecond （10^-12 s） pulse width, which is the same as the electro-optical relaxation time （10 ^-6-10^-12 s） or even shorter. When picosecond laser interacts with materials, there is no enough time for electron to transfer the energy to crystal lattice. Therefore, there＇s little heating effect during fabrication, which is called cold ablation. This technology is widely used for precision machining in astronautics, national defense, materials, medical science, biological science and so on. The technique of micro nano fabrication by picosecond lasers is introduced and the precision drilling on high hardness metal, the hard and brittle materials cutting and the selective surface removal with picosecond lasers are summarized. The challenges and future trends of micro-nano fabrication by picosecond lasers are pointed out.

关 键 词：激光技术 皮秒激光 再生放大 腔倒空 微纳加工 

分 类 号：TG485[金属学及工艺—焊接]