机器人运行对超净空气环境的影响  

The Influence to Cleanroom Environment by Acting Robot

作　　者：朱兰[1] 黄向阳[1] 任志伟[1] 

机构地区：[1]苏州市计量测试研究所

出　　处：《洁净与空调技术》2016年第4期6-10,共5页Contamination Control & Air-Conditioning Technology

摘　　要：苏州市计量测试研究所建成《空气化学污染控制检测评定实验室》,核心区空气洁净度达到IS0 1级,化学过滤系统效率>95%、浓度值<10 ppb并配置温度、相对湿度、断面风速洁净度实时检测系统,具有优良的超净空气背景环境。接受ABB公司委托进行机器人发尘测试,在中国尚属首例。检测条件:温度23.2℃~24.6℃;相对湿度48.3%~58.1%;垂直风速0.45m/s^0.47m/s;空态空气洁净度优于ISO 1级(实际工况:≥0.1μm,0颗/m^3)。测试结果:5轴类机器人,无论半速还是全速运转,超净环境洁净度仍保持ISO 1级。1轴机器人运转,使超净空气环境洁净度降至ISO 2级或ISO 3级。洁净度等级判定按照ISO 14644-1:1999/GB/T 25915.1-2010。实验参照ISO/DIS 14644-14:2014洁净室及相关受控环境——第14部分:"按设备散发粒子浓度评定其使用适合性"。The lab for control, test and evaluation of chemical contamination was established in Suzhou Metrological Research Institute. The core area of which reached ISO Classl in terms of particle concentration, with chemical filter efficiency〉95% and chemical concentration〈10 ppb as well as real time monitoring of temperature and humidity and air velocity fro reliable background environment of clean air. As entrusted by ABB, the particle emission by a robot was tested as the first practice in China. Its test conditions were as follows： temperature 23.2 to 24.6℃ , humidity 48.3-58.1%, vertical air velocity 0.45-0.47 m/s, as built air cleanliness better than ISO Class 1 （zero count per cubic meter for particle〉0.1 μm）. The test results were as follows. The environment maintained at ISO Class 1 for 5-axle robot with half or full rotation speed for 1-axle robot, the environment still could reach ISO Class 2 or Class 3. The classification was judged based on ISO 14644-1：1999/GB/T 25915.1-2010. The test was referenced to ISO/DIS ISO 14644-14：2014 Part 14：The Assessment of suability for Use of Equipment in by airborne particle concentration.

关 键 词：机器人 发尘 超净环境 判定 评定 

分 类 号：TU834.8[建筑科学—供热、供燃气、通风及空调工程]