多层及交替多层NdFeB/Nd薄膜的磁性能  

Magnetic Properties of Multilayer and Alternative Multilayer NdFeB/Nd Thin Films

作　　者：张敏刚[1] 刘丽[1] 陈峰华[1] 李敏杰[1] 

机构地区：[1]太原科技大学,山西太原030024

出　　处：《稀有金属材料与工程》2017年第1期270-273,共4页Rare Metal Materials and Engineering

基　　金：教育部高等学校博士点基金(20101415110003);山西省自然科学基金(2008011042-2);山西省回国留学人员科研资助项目(2013-098)

摘　　要：采用磁控溅射法制备了Nd Fe B/Nd 2组薄膜,经650℃退火处理后,对样品进行了XRD和VSM测试分析。结果表明:对于Mo/Nd/Nd Fe B/Nd/Mo多层薄膜,当Nd Fe B/Nd厚度比为6/5时,薄膜的内禀矫顽力最好,平行和垂直方向的内禀矫顽力分别为14.5×79.6和10.5×79.6 k A·m^(-1);对于Mo/[Nd Fe B/Nd]n/Mo(n=2,5,8,10;Nd Fe B/Nd厚度比为6/5)交替多层薄膜,当周期n为8时,薄膜具有最好的磁性能,平行和垂直方向的内禀矫顽力分别为21.3×79.6和16.7×79.6 k A·m^(-1);对于Nd Fe B/Nd厚度比均为6/5的薄膜,交替多层膜的综合磁性能高于多层膜。Two types of Nd Fe B/Nd thin films were deposited by a magnetron sputtering method. After annealing at 650 °C, the samples were analyzed by XRD and VSM. Results show that the Mo/Nd/Nd Fe B/Nd/Mo multilayer thin film with the thickness ratio of Nd Fe B/Nd=6/5 exhibits high coercivity. The parallel and perpendicular coercivity of multilayer films are 14.5×79.6 k A·m^（-1）and 10.5×79.6 k A·m^（-1）, respectively. The Mo/[Nd Fe B/Nd]n/Mo（n=2, 5, 8, 10, Nd Fe B/Nd=6/5） alternative multilayer thin film with n=8 shows good hard magnetic properties. The parallel and perpendicular coercivity of the alternative multilayer thin film are 21.3×79.6 k A·m^（-1）and 16.7×79.6 k A·m^（-1）, respectively. The magnetic properties of the alternative multilayer film with thickness ratio of Nd Fe B/Nd=6/5 are enhanced in comparison with the multilayer film.

关 键 词：磁控溅射 NdFeB/Nd薄膜 磁性能 

分 类 号：TB383.2[一般工业技术—材料科学与工程] O611.3[理学—无机化学]