半导体工艺实验室的建设与管理实践  

Construction and management practice of semiconductor technology laboratory

作　　者：黄展云[1] 陈晖[1] 谢德英[1] 陈弟虎[1] 

机构地区：[1]中山大学电子与信息工程学院,广东广州510275

出　　处：《实验室科学》2016年第6期205-208,共4页Laboratory Science

基　　金：中山大学本科教学改革研究课题"集成电路制造工艺创新实验对学生科研能力的培养"(项目编号:30000-16300008)

摘　　要：以建设一条"硅工艺教学生产线"为目标,中山大学建立了半导体工艺实验室。详细介绍了实验室的建设现状,包括分区设置和仪器配备,结合微电子专业特点,开设了有关课程。从三方面详细阐述了该实验室的建设和管理实践,分别是:建设规范化实验室、建设安全实验室和建设绿色实验室,有利于实验教学工作顺利、有效和安全地进行。最后,提出三个需要解决的问题,包括师资队伍的建设、实验室建设工作计划的完善和开放实验室制度的建立。该实验室的建设,完善了微电子专业的实验教学,有利于提高学生的实践能力和创新能力。In order to build a “silicon production line”,we have established the semiconductor tech-nology laboratory. This paper introduced the construction of the laboratory,including regional distribu-tion and related instruments. According to the characteristics of microelectronics,we offer some new courses. And then,we described the construction plan and management practice from three aspects, consists of building standardized laboratory,building safe laboratory and building green laboratory. It is good for experiment teaching work smoothly,effectively and safely. Finally,three questions were put forward, including the construction of teachers, the perfection of the laboratory construction plan and the establishment of the open laboratory system. The laboratory improves the experimental teaching of microelectronics specialty in our college,and helps to improve the students, practical ability and inno-vative ability.

关 键 词：工艺实验室 规范化 安全管理 绿色实验室 

分 类 号：G482[文化科学—教育学]