复杂形状硬质合金刀具沉积金刚石薄膜涂层过程的热丝分布研究  

Research on Hot Filament Arrangement in Diamond Film Deposition on Cemented Carbide Tools with Complicated Shape

作　　者：许幸新[1] 张晓辉[1] 向道辉[1] 赵波[1] 

机构地区：[1]河南理工大学机械与动力工程学院,河南焦作454000

出　　处：《稀有金属与硬质合金》2016年第6期68-72,共5页Rare Metals and Cemented Carbides

基　　金：国家自然科学基金(51475148);河南省科技攻关项目(152102210108);河南理工大学博士基金(B2011-096)

摘　　要：针对热丝化学气相沉积法在复杂形状硬质合金刀具上涂覆金刚石薄膜,对比分析了常见热丝布置方式的特点。在此基础上,采用超声辅助酸碱法预处理、单排两根热丝平行布置方式以及优化的沉积工艺,在YG6硬质合金钻头上沉积金刚石薄膜。对金刚石涂层的成膜质量进行微观检测,并对环氧树脂基碳纤维复合材料进行钻削试验,分析了涂层刀具的磨损形貌和钻孔出入口质量。结果表明,采用改进的热丝布置方式,在涂层过程中能使切削刃各部分均匀涂覆金刚石薄膜;涂层在钻削过程中具有良好的附着强度,并从一定程度上减轻了刀具的磨损,改善了钻孔出入口的毛刺和啃边现象。Characteristics were comparatively analyzed of common hot-filament arrangement in hot-filament chemical vapor deposition of diamond films on cemented carbide tools with complicated shape.Then diamond films were deposited on YG6 cemented carbide drill surface by ultrasound-assisted acid-alkali pretreatment and parallel arrangement of single-row two filaments with the optimized deposition process.Surface quality of diamond films was tested by microscopic examination and drilling experiments were performed on carbon fiber reinforced epoxy resin matrix composites to analyze wear morphology of the coated tools and access quality of the drilled holes.The results show that diamond films can be deposited uniformly on cutting edge with improved filament arrangement method.Diamond films exhibit good adhesion during drilling,and reduce tool wear and burr and edge failure in the access of the drilled holes to a certain extent.

关 键 词：金刚石薄膜 涂层 复杂形状硬质合金刀具 热丝化学气相沉积 热丝分布 钻削 

分 类 号：TG174.444[金属学及工艺—金属表面处理]