Na-N共掺对ZnO薄膜结构及光学性质的影响  

Effect of Na-N co-doping on structure and optical property of ZnO film

作　　者：于富成[1] 王雷[1] 吕从燕 丁会云 耿武[1] 何玲[1] 

机构地区：[1]兰州理工大学材料科学与工程学院,甘肃兰州730050

出　　处：《兰州理工大学学报》2017年第1期29-32,共4页Journal of Lanzhou University of Technology

基　　金：吉林大学集成光电子学国家重点联合实验室开放课题(IOSKL2014KF01);甘肃省博士后科研项目择优基金资助;兰州理工大学科研启动基金资助

摘　　要：采用溶胶/凝胶法在石英衬底上制备Na-N共掺ZnO纳米薄膜,研究Na掺杂原子分数对ZnO薄膜结构和光学性能的影响.结果表明:适度的Na掺杂,使得薄膜结晶质量明显改善,但过高原子分数的掺杂,则会诱发新的缺陷,导致结晶质量下降.在可见光区域,薄膜透光率随Na掺杂原子分数的升高而升高,掺杂原子分数7.5%的薄膜透光率达到90%左右.Na掺杂原子分数对ZnO的光学带隙产生了直接的影响.Na-N co-doped ZnO nano-filmS were deposited onto quartz substrates with sol-gel method and the influence of Na doping concentration on the structure and optical performance was investigated. The result showed that the Crystalline quality of the film would be improved remarkably with appropriate Na doping. But excessive concentration of doping would induce a new defect and lead to the decrease of the crystalline quality. Within the range of visible light, the transmittance of the ZnO film would increase with the increase of the concentration of doped Na and its maximum transmittance would be about 90% with doping atom-fraction of 7.5%. The optical band width of ZnO would be directly affected by Na doping concentration.

关 键 词：溶胶/凝胶法 ZNO薄膜 掺杂 

分 类 号：TB34[一般工业技术—材料科学与工程]