基于Lab Windows/CVI的真空镀膜设备的控制系统开发  

Development of Control System for Vacuum Coating Equipment Based on Lab Windows/CVI

作　　者：康豪[1] 宋一凡[1] 宣科[1] 刘功发[1] 

机构地区：[1]中国科学技术大学国家同步辐射实验室,安徽合肥230029

出　　处：《真空》2017年第1期1-4,共4页Vacuum

摘　　要：真空镀膜技术是目前具有良好发展前景的一项技术,在工业领域具有重要的作用。本文以安徽纯源真空镀膜科技有限公司生产的真空镀膜设备PIS-212的控制系统为例,介绍了一种基于Lab Windows/CVI开发平台的控制系统解决方案,该方案具有开发快速高效、人机界面友好、"一键式"操作方式和功能丰富齐全的特点。Vacuum coating is important in modern industry due to its potential advantages. In this work, to introduce a solution of the control system based on Lab Windows/CVI, the PIS-212 deposition system of Anhui Chun-yuan Vacuum Coating Technology Company was taken to as an example. The result shows that, the control system responses quickly with friendly human-machine interface, one-button automatic operation and plentiful functions.

关 键 词：LAB WINDOWS/CVI 真空镀膜设备 控制系统 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]