常压高频等离子体电子温度的光谱法诊断  

Spectroscopic Diagnosis of Atmosphere High Frequency Air Plasma Electron Temperature

作　　者：孙元成[1] 宋学富[1] 杜秀蓉[1] 张晓强[1] 王慧[1] 

机构地区：[1]中国建筑材料科学研究总院,北京100024

出　　处：《光谱学与光谱分析》2017年第2期368-373,共6页Spectroscopy and Spectral Analysis

基　　金：国家科技支撑计划项目(2013BAE03B01);国家国际科技合作专项(2012DFA51310);中国建筑材料科学研究总院青年科学基金项目(2013-YT-91)资助

摘　　要：常压高频等离子体由于其无电极污染、能量密度大、温度高及气氛可控的特点而得到了广泛应用,电子温度是影响其使用性能的关键参数,根据发射光谱使用玻尔兹曼图解法计算是最常用且最可行的诊断方法,但由于跃迁几率数据可靠性、环境背景、仪器误差、数据处理误差等原因,不同研究者根据不同谱线计算的结果通常不具有可比性。为了得到可靠性高的电子温度计算结果,针对存在SiO_2颗粒的常压高频空气等离子体,以光谱范围为200~1 077nm的7通道高分辨光纤光谱仪为测量工具,该研究讨论了元素、光谱段选择对计算结果可靠性的影响。结果表明,由于N_2占电离气体的主要部分且不参与化学反应,NⅠ发射谱线是最佳选择,使用738~940nm内NⅠ的谱线计算的拟合度为0.95,计算的电子温度最为可靠;由于Si和O极易结合成SiO_2颗粒,此二元素的能量不再满足玻尔兹曼分布,计算结果的可靠性较差,因此不能使用Si和O元素的发射谱线计算电子温度;使用掺入Ar的谱线同样不能得到可靠的电子温度计算结果。因此,为了有效诊断等离子体电子温度,在不同应用场合中,应当根据实际情况,合理选择测量光谱范围及光谱仪,选取合适的粒子及其发射谱线。Atmosphere high frequency plasma is widely used due to its advantages of free of electrode pollution,high energy density high temperature and controllable redox conditions.As the key parameter in practical use,electron temperature of plasma is commonly diagnosed with atomic emission spectroscopy and calculated with Boltzmann plots.But electron temperatures calculated based on different lines by different researchers are usually not comparable due to transition probability data,application environment,instrumental error and data processing.This paper discussed influences of element and spectral range on calculated electron temperature for the first time in order to obtain reliable electron temperature of atmosphere high frequency air plasma.7-channel high resolution fiber spectrometer with measurement range of 200-1 077 nm was used to test atomic emission spectroscopy.The experiment indicates that：The Rsquare of fitted slope is 0.95 and standard deviation is the lowest using N Ⅰlines in 738-940nm and the calculated electron temperature is the most reliable;electron temperature calculated with Si and O lines are unreliable because they are easily binding to heavy SiO2particles;reliable electron temperature also cannot be obtained by mixed Ar lines.

关 键 词：高频等离子体 发射光谱 电子温度 

分 类 号：O657.3[理学—分析化学]