低温泵在超高真空炉中的应用实例  

Application of Cryopump to Ultra High Vacuum Furnace

作　　者：卢少波 王承章 张吉峰 

机构地区：[1]北京真空电子技术总公司,北京100015

出　　处：《真空科学与技术学报》2017年第2期141-145,共5页Chinese Journal of Vacuum Science and Technology

摘　　要：十多年前开始在真空电子技术相关工艺设备中应用低温泵、干泵无油系统来获得超高真空,效果满意。这次尝试将低温泵快速、洁净和可靠的独特优势应用到真空炉中。将低温泵并入真空系统中,达到清洁的超高真空环境。本文以实例介绍了低温泵在超高真空炉中的应用;重点介绍了低温泵真空系统的设计思路,真空系统的主要配置和注意事项,低温泵的选型计算,并用图示方法详细介绍了低温泵系统的安装、使用和维护等环节。对同类真空炉的研发和低温泵的应用都有参考价值。通过严格把关各研发环节,按照超高真空规范进行清洗,除气和烘烤,最后真空炉的极限压力达到了2×10^(-7)Pa,将常规的真空炉极限压力延伸了近一个数量级。A novel ultrahigh vacuum（ UHV） system,mainly consisting of cryo-pump and oil free vacuum pump unit（ molecular and dry scroll pumps） and dedicated to the high-temperature furnace for fabrication of vacuum electronics devices,was developed. The effective insulation of the cryopump from the large heat loads,including but not limited to the heat radiation in baking and operation of the furnace,heat-transfer in gas flow,and heat conduction of metal connections,was investigated for design optimization. The solutions included the multilayered heat reflective screens,parallel connection of the magnetic suspension molecular pump and cryo-pump,use of a square tube elbow,water-cooled ＂scarf＂of the gas outlet-pipe,and simultaneously starting of the turbo pump and helium compressor. The ultimate pressure of the newly-designed UHV furnace,after regular cleaning,degassing and baking,was estimated to be 2 × 10^-7Pa,roughly one order of magnitude lower than that of the conventional vacuum furnace.

关 键 词：低温泵 超高真空 真空炉 实例 

分 类 号：TF138[冶金工程—冶金物理化学]