基于光谱共焦位移传感器的非接触式回转误差测量系统  

A non contact system for measurement of rotating error based on confocal chromatic displacement sensor

作　　者：蓝河 雷大江[1] 钱林弘 夏欢[1] 孙树磊[1] 

机构地区：[1]中国工程物理研究院机械制造工艺研究所,四川绵阳621900

出　　处：《制造技术与机床》2017年第3期141-145,共5页Manufacturing Technology & Machine Tool

基　　金：四川省科技支撑计划(2016RZ0047);中物院科技专项资助(9120602)

摘　　要：为了实现50 nm左右回转误差测量,设计了一种新型非接触式测量系统,该系统采用光谱共焦位移传感器,通过反向法获得回转轴系径向回转误差、标准球圆度误差。标准球圆度误差测量值与标称值的最大差值为5 nm,表明该测量系统的测量精度能够满足设计要求。A new type of non contact system for measurement of rotating error based on confocal chromatic displacement sensor with reversal method was designed for measuring rotating error of rotary axis system with the value of approximated 50 nm. The difference between the measurement value and the nominal value is less than 5 nm, which is shown by study that the system meets the requirement for design.

关 键 词：回转误差 光谱共焦位移传感器 反向法 非接触式 超精密回转轴系 

分 类 号：TH161.13[机械工程—机械制造及自动化]