用傅立叶变换红外光谱法检测气体中微量乙硼烷  

Quantitative Determination of Trace Diborane in Gases with FT-IR Method

作　　者：李福芬 李扬 孙宝宇 高天东 曲庆 

机构地区：[1]大连大特气体有限公司,辽宁大连116021

出　　处：《低温与特气》2017年第1期37-41,共5页Low Temperature and Specialty Gases

摘　　要：利用配备长光程气体池的傅立叶变换红外光谱仪对气体中微量乙硼烷进行了定量分析。在恒定实验条件下进样,分辨率为4 cm^(-1),扫描8次,可以得到理想的分析结果。定量分析结果表明,该方法重复性良好(相对标准偏差<0.5%),在0~100×10^(-6)摩尔分数范围内线性良好(R^2=0.9996),扩展不确定度小(<4%),可用于气体中微量乙硼烷的定量分析。Trace amount of diborane in gases were determined quantitatively using FT-IR, which is equipped with a long path cell. Satisfying results were obtained with a resolution of 4 cm-1 and 8 scans. The quantitative resuhs of diborane demonstrated that FT-IR method had excellent repeatability （RSD 〈 1% ）, linearity （ R2 = 0. 9996）, and low expanded uncertainty （ 〈 4% ）. This method provided opportunities for the determination of diborane, which have difficulties in quantification with other methods.

关 键 词：傅立叶变换红外光谱仪 长光程气体池 微量 乙硼烷 定量 不确定度 

分 类 号：O647.33[理学—物理化学] TQ117[理学—化学]